Ultralow-loss concave micromirrors with radius of curvature below 60 (mu)m were fabricated by laser ablation and reflective coatings. A 10-(mu)m-long microcavity with a mode volume of 40 (mu)m~(3) was set up with two such mirrors, and the cavity linewidth was measured both spectrally and temporally. The smallest linewidth obtained was 96 MHz, corresponding to a quality factor of 3.3 X 10~(6) and a finesse in excess of 1.5 X 10~(5). With these parameters, we estimate that a variety of solid-state quantum emitters coupled to the cavity may enter the strong coupling regime.
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机译：通过激光烧蚀和反射涂层来制造曲率半径低于60μm的超低损耗凹面微镜。用两个这样的反射镜建立了一个10微米长的微腔，模腔体积为40微米〜（3），并在光谱和时间上测量了腔的线宽。获得的最小线宽为96 MHz，对应于3.3 X 10〜（6）的品质因数和超过1.5 X 10〜（5）的精细度。利用这些参数，我们估计耦合到腔体的各种固态量子发射器可能会进入强耦合状态。
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