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High-performance 90 deg hybrid based on a silicon-on-insulator multimode interference coupler

机译:基于绝缘体上硅多模干扰耦合器的高性能90度混合器

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We propose a multimode interference coupler (MMI) design for high-index-contrast technologies based on a shallowly etched multimode region, which is, for the first time to our knowledge, directly coupled to deeply etched input and output waveguides. This reduces the phase errors associated with the high-index contrast, while still allowing for a very compact layout. Using this structure, we fabricate a 2 X 4 MMI operating as a 90 deg hybrid, with a footprint of only 0.65 mm X 0.53 mm, including all the structures necessary to couple light to a fiber array. We experimentally demonstrate a common mode rejection ratio better than -20 dBe and phase errors better than +-5 deg in a approx50 nm bandwidth.
机译:我们提出了一种基于浅蚀刻的多模区域的高折射率对比度技术的多模干扰耦合器(MMI)设计,这是我们所知首次将其直接耦合至深蚀刻的输入和输出波导。这减少了与高折射率对比度相关的相位误差,同时仍然允许非常紧凑的布局。使用这种结构,我们制造了一个2 X 4 MMI,可作为90度混合器使用,占位面积仅为0.65 mm X 0.53 mm,包括将光耦合到光纤阵列所需的所有结构。我们通过实验证明,在大约50 nm的带宽中,共模抑制比优于-20 dBe,相位误差优于+ -5度。

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