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Optical fiber tip acoustic resonator for hydrogen sensing

机译:用于氢感测的光纤尖端声谐振器

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A microscale acoustic resonator fabricated on a standard single-mode fiber tip was demonstrated as a hydrogen sensor. The fabrication of the resonator involved standard fiber cleaving and splicing, radio frequency sputtering, focused-ion-beam patterning and deposition, and wet etching. A submicrometer layer of platinum was coated on the vibration arms of the resonator serving as a catalytic heater upon hydrogen exposure. The heat locally raised the resonator temperature, which led to an acoustic resonance frequency shift. The sensor's resonance frequency at 1.7 MHz shifted 1170.4 Hz upon exposure to 1percent hydrogen concentration; the sensitivity of the sensor was estimated to be better than 0.1percent.
机译:演示了在标准单模光纤尖端上制造的微型声谐振器作为氢传感器。谐振器的制造包括标准的光纤切割和熔接,射频溅射,聚焦离子束的图案形成和沉积以及湿法蚀刻。在暴露于氢的情况下,将铂的亚微米层涂覆在用作催化加热器的谐振器的振动臂上。热量局部升高了谐振器温度,从而导致了声共振频率偏移。暴露于1%的氢浓度时,传感器在1.7 MHz处的共振频率偏移1170.4 Hz;传感器的灵敏度据估计优于0.1%。

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