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首页> 外文期刊>Optics Letters >Ultraviolet laser-induced damage on fused silica substrate and its sol-gel coating
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Ultraviolet laser-induced damage on fused silica substrate and its sol-gel coating

机译：紫外激光对熔融石英基底及其溶胶-凝胶涂层的破坏

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摘要

A comparative study of the laser-induced damage thresholds (LIDTs) of fused silica substrates and their sol-gel silica coatings was carried out with 355 nm laser irradiation. Chemical etching and superpolishing were employed in different ways to improve the substrate. The laser damage tests showed that the coated substrate was no more susceptible to laser damage than the bare substrate, showing that the substrate quality was the dominant factor limiting the LIDT for UV irradiation. In addition, it was found that high value of substrate microroughness was more harmful to the LIDT of the coated than the bare substrate, and that a proper combination of etching and superpolishing can optimize the LIDT.
机译：用355 nm激光照射对熔融石英基底及其溶胶-凝胶二氧化硅涂层的激光诱导损伤阈值（LIDT）进行了比较研究。化学蚀刻和超抛光被以不同的方式用于改善衬底。激光损伤测试表明，涂覆的基材比裸露的基材更不易受到激光损伤，表明基材的质量是限制UV辐射LIDT的主要因素。另外，已经发现，较高的基底微粗糙度值比裸露的基底对涂覆的LIDT更有害，并且蚀刻和超抛光的适当组合可以优化LIDT。

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