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首页> 外文期刊>Optics Letters >Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO_2 laser for an extreme ultraviolet light source
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Transverse-flow radio-frequency-excited amplifier seeded by a cavity-dumped CO_2 laser for an extreme ultraviolet light source

机译：腔漏式CO_2激光器植入的横向流射频激励放大器，用于极紫外光源

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摘要

A transverse-flow radio-frequency-exited CO_2 laser amplifier was evaluated by a short-pulse seed laser. We constructed a prototype transverse-flow amplifier for the extreme UV laser-produced-plasma source. The electrical power for the discharge was enhanced to 100 kW at a 100% duty cycle. A Q-switched cavity-dumped CO_2 seed laser emitting 13 ns pulses with a repetition rate of 100 kHz was amplified along a fivefold optical path in the amplifier gain medium. As a result, the amplifier output an average power of 3.07 kW with an 8.5 W laser input. The electrical-to-optical efficiency was 3.1%, which was far higher than that of axial-flow amplifiers at the same laser input power. The pulse showed a slight stretch from an input duration of 13 ns to an output of 15 ns.
机译：用短脉冲种子激光器评估了横流射频激发的CO_2激光放大器。我们为极端的紫外线激光产生的等离子体源构建了一个原型横向流放大器。用于放电的电功率在100％占空比下增加到100 kW。在放大器增益介质中沿五倍光学路径放大了发射13 ns脉冲，重复频率为100 kHz的Q开关腔腔倾倒CO_2种子激光器。结果，该放大器的输出功率为8.5 W，激光输出为3.07 kW。在相同的激光输入功率下，电光效率为3.1％，远高于轴流放大器的电光效率。脉冲显示出从13 ns的输入持续时间到15 ns的输出的轻微扩展。

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