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Accurate determination of terahertz optical constants by vector network analyzer of Fabry-Perot response

机译:用矢量网络分析仪的Fabry-Perot响应精确测定太赫兹光学常数

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摘要

We present a method based on a Fabry-Perot model to efficiently and accurately estimate optical constants of wafer samples in transmission-only measurements performed by a vector network analyzer (VNA). The method is demonstrated on two separate wafer samples: one of silicon and the other of polymethylmethacrylate. Results show that the method can not only acquire optical constants accurately and simply over a broad frequency domain but also overcome the limitations of calculation for dispersive and lossy materials to which existing methods are susceptible, such as those based on VNA-driven quasi-optical transmissometers and terahertz time-domain spectrometry.
机译:我们提出了一种基于Fabry-Perot模型的方法,可以通过矢量网络分析仪(VNA)在仅传输的测量中高效,准确地估算晶圆样品的光学常数。在两个单独的晶圆样本上演示了该方法:一个是硅,另一个是聚甲基丙烯酸甲酯。结果表明,该方法不仅可以在宽广的频域上准确,简单地获取光学常数,而且还克服了现有方法容易受到的色散和有损材料(例如基于VNA驱动的准光学透射仪的方法)的计算限制。和太赫兹时域光谱。

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