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Electrodes for wide-bandwidth substrate-removed electro-optic modulators

机译:宽带去除基板的电光调制器的电极

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摘要

This Letter is on wide-bandwidth electrodes suitable for ultralow voltage substrate-removed compound semiconductor electro-optic modulators. Using a loaded line approach, traveling wave electrodes suitable for wide-bandwidth and low-voltage operation were studied theoretically and experimentally up to 35 GHz. Using staircase waveguides and n-i-p-i-n epilayer designs, electrode capacitance and resistance were reduced significantly. Experimental and modeling results are found to agree very well. Theoretical and experimental results indicate that subvolt modulators with electrical to optical bandwidths in excess of 30 GHz are possible.
机译:这封信是关于宽带电极,适用于去除超低压衬底的化合物半导体电光调制器。使用负载线方法,对高达35 GHz的带宽和低电压工作的行波电极进行了理论和实验研究。使用阶梯形波导和n-i-p-i-n外延层设计,可以显着降低电极电容和电阻。实验和建模结果非常吻合。理论和实验结果表明,电光带宽超过30 GHz的亚伏特调制器是可能的。

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