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Grating-coupled silicon-on-sapphire integrated slot waveguides operating at mid-infrared wavelengths

机译:在中红外波长下工作的光栅耦合蓝宝石上集成的缝隙波导

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摘要

We demonstrate subwavelength bidirectional grating (SWG) coupled slot waveguide fabricated in silicon-on-sapphire for transverse electric polarized wave operation at 3.4 μm wavelength. Coupling efficiency of 29% for SWG coupler is experimentally achieved. Propagation loss of 11 dB/cm has been experimentally obtained for slot waveguides. Two-step taper mode converters with an insertion loss of 0.13 dB are used to gradually convert the strip waveguide mode into slot waveguide mode.
机译:我们演示了蓝宝石上制造的亚波长双向光栅(SWG)耦合缝隙波导,用于在3.4μm波长下进行横向电偏振波操作。通过实验可实现SWG耦合器29%的耦合效率。对于缝隙波导,已经通过实验获得了11 dB / cm的传播损耗。插入损耗为0.13 dB的两步锥形模式转换器用于将带状波导模式逐渐转换为缝隙波导模式。

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