Fourier spectrum method to determine dose-to-clear in a photoresist

Lei Sun; Obert Wood; Chris Clifford; Sudhar Raghunathan; Oleg Kritsun; Myungjun Lee; Ryoung-Han Kim; Pawitter Mangat; Hui Peng Koh; Harry Levinson

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Fourier spectrum method to determine dose-to-clear in a photoresist

机译：傅里叶光谱法确定光致抗蚀剂的清除剂量

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A Fourier spectrum method to determine the dose-to-clear in a photoresist is proposed. The frequency content of scanning electron microscope resist images is used to determine whether the resist has been dissolved. Using this method, the dose to clear the resist is calculated automatically instead of via visual inspection, a method in which operator influence can affect the result.

机译：提出了一种傅立叶光谱方法来确定光刻胶中的清除剂量。扫描电子显微镜抗蚀剂图像的频率含量用于确定抗蚀剂是否已溶解。使用此方法，可以自动计算清除抗蚀剂的剂量，而无需通过目测检查，操作人员的影响会影响结果。

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《Optics Letters》 |2014年第2期|共3页
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Lei Sun; Obert Wood; Chris Clifford; Sudhar Raghunathan; Oleg Kritsun; Myungjun Lee; Ryoung-Han Kim; Pawitter Mangat; Hui Peng Koh; Harry Levinson;
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1. Fourier spectrum method to determine dose-to-clear in a photoresist [J] . Lei Sun, Obert Wood, Chris Clifford, Optics Letters . 2014,第2期

机译：傅里叶光谱法确定光致抗蚀剂的清除剂量
2. Comparison of near-infrared, fourier transform-infrared, and fourier transform-raman methods for determining olive pomace oil adulteration in extra virgin olive oil [J] . Hong Yang, Joseph Irudayaraj Journal of the American Oil Chemists' Society . 2001,第9期

机译：比较近红外，傅里叶变换红外和傅里叶变换拉曼法测定特级初榨橄榄油中橄榄油渣油掺假的方法
3. Comparison of Near-Infrared, Fourier Transfrom-Infrared, and Fourier Transform-Raman Methods for Determining Olive Pomance Oil Adulteration in Extra Virgin Olive Oil [J] . Hong Yang, Joseph Irudayaraj Journal of the American Oil Chemists' Society . 2001,第9期

机译：测定特级初榨橄榄油中橄榄油渣油掺假的近红外，傅里叶变换红外和傅里叶变换拉曼方法的比较
4. Determining the Profile Parameters of Photoresist Grating with Spectrum Deductive Method [C] . CHEN Xinrong, LI Chaoming, Wu Jianhong, AOMATT 2010;International symposium on advanced optical manufacturing and testing technologies . 2011

机译：用频谱演绎法确定光刻胶光栅的轮廓参数
5. THE DEVELOPMENTS OF A METHOD FOR ESTIMATING DIRECTIONAL WAVE SPECTRUM FROM SPARSE ARRAYS (FOURIER, TRANSFORM). [D] . LIN, YEONG-CHENG. 1984

机译：从稀疏矩阵（傅里叶变换）估计方向波谱的方法的发展。
6. A novel clustering method via nucleotide-based Fourier power spectrum analysis [O] . Bo Zhao, Victor Duan, Stephen S.-T. Yau -1

机译：基于核苷酸的傅立叶功率谱分析的新型聚类方法
7. PERFORMANCE OF MACHINE LEARNING METHODS IN DETERMINING THE AUTISM SPECTRUM DISORDER CASES [O] . Ayşe Demirhan 2018

机译：机器学习方法在确定自闭症谱系案例中的性能
8. FOURFIT-A Computer Code for Determining Equivalent Nuclear Yield and Peak Overpressure by a Fourier Spectrum Fit Method [R] . Steedman, D. W., Partch, J. C. 1984

机译：FOURFIT-用傅里叶谱拟合法确定等效核产率和峰值超压的计算机代码

Fourier spectrum method to determine dose-to-clear in a photoresist

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