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Silicon-based metal-loaded plasmonic waveguides for low-loss nanofocusing

机译:硅基金属负载等离子波导管,用于低损耗纳米聚焦

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摘要

We introduce plasmonic waveguides based on metal loading of silicon-on-insulator (SOI) substrates. Here slab waveguide modes hybridize with the plasmonic modes of either a metal nanowire or a slot in a metal film. By tapering a single dimension of either structure, the resulting hybrid mode can be converted from photon-like to plasmon-like, allowing up to millimeter-range transport and rapid nanoscale focusing down to mode areas ~λ~2/400. Metal loading is achievable with a single lithography step directly on SOI without the need for etching and, thus, opens practical possibilities for silicon nanoplasmonics.
机译:我们介绍了基于绝缘体上硅(SOI)衬底金属负载的等离子波导管。在这里,平板波导模式与金属纳米线或金属膜中缝隙的等离激元模式杂交。通过减小任一结构的单一维度,可以将最终的混合模式从光子转换为等离子激元,从而实现高达毫米范围的传输和快速的纳米级聚焦,直至模式区〜λ〜2/400。通过直接在SOI上的一个光刻步骤就可以实现金属负载,而无需进行蚀刻,因此为硅纳米等离子体技术带来了实际的可能性。

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