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Optimizing the nanoscale quantitative optical imaging of subfield scattering targets

机译:优化子场散射目标的纳米级定量光学成像

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The full 3-D scattered field above finite sets of features has been shown to contain a continuum of spatial frequency information and, with novel optical microscopy techniques and electromagnetic modeling, deep-subwavelength geometrical parameters can be determined. Similarly, by using simulations, scattering geometries and experimental conditions can be established to tailor scattered fields that yield lower parametric uncertainties while decreasing the number of measurements and the area of such finite sets of features. Such optimized conditions are reported through quantitative optical imaging in 193 nm scatterfield microscopy using feature sets up to four times smaller in area than state-of-the-art critical dimension targets. (C) 2016 Optical Society of America
机译:有限特征集上方的完整3-D散射场已显示为包含连续的空间频率信息,通过新颖的光学显微镜技术和电磁建模,可以确定深亚波长的几何参数。类似地,通过使用仿真,可以建立散射几何形状和实验条件,以调整产生较低参数不确定性的散射场,同时减少测量次数和此类有限特征集的面积。通过在193 nm散射场显微镜中进行定量光学成像,使用比最先进的临界尺寸目标小四倍的特征集,可以报告这种优化条件。 (C)2016美国眼镜学会

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