Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2 x 10(6) were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices. (C) 2016 Optical Society of America
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机译：低损耗波导是集成光子系统的重要组成部分。在这项工作中，我们研究了使用电子束光刻技术，然后进行等离子体干法刻蚀，在Ge23Sb7S70硫属化物玻璃中制造低损耗光子器件。演示了具有0.5 dB / cm的低传播损耗的高折射率对比波导和本征品质因数（Q-factor）为1.2 x 10（6）的微盘谐振器。就我们所知，这两个数字代表了迄今为止在亚微米单模硫属化物玻璃器件中报告的最佳低损耗结果。 （C）2016美国眼镜学会
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