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Low helium permeation cells for atomic microsystems technology

机译：用于原子微系统技术的低氦渗透池

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Laser spectroscopy of atoms confined in vapor cells can be strongly affected by the presence of background gases. A significant source of vacuum contamination is the permeation of gases such as helium (He) through the walls of the cell. Aluminosilicate glass (ASG) is a material with a helium permeation rate that is many orders of magnitude lower than borosilicate glass, which is commonly used for cell fabrication. We have identified a suitable source of ASG that is fabricated in wafer form and can be anodically bonded to silicon. We have fabricated chip-scale alkali vapor cells using this glass for the windows and we have measured the helium permeation rate using the pressure shift of the hyperfine clock transition. We demonstrate micro fabricated cells with He permeation rates at least three orders of magnitude lower than that of cells made with borosilicate glass at room temperature. Such cells may be useful in compact vapor-cell atomic clocks and as a micro fabricated platform suitable for the generation of cold atom samples. (C) 2016 Optical Society of America
机译：背景气体的存在会严重影响局限在蒸气室中的原子的激光光谱。真空污染的一个重要来源是诸如氦气（He）之类的气体透过电池壁的渗透。硅铝酸盐玻璃（ASG）是一种氦渗透率比通常用于电池制造的硼硅酸盐玻璃低许多数量级的材料。我们已经确定了合适的ASG来源，该来源可以晶片形式制造并且可以阳极键合到硅上。我们使用这种玻璃作为窗户，制造了芯片级碱性蒸气电池，并使用超精细时钟转换的压力偏移测量了氦的渗透率。我们证明了在室温下，He渗透率比用硼硅酸盐玻璃制成的电池低至少三个数量级的微型电池。此类电池可用于紧凑型蒸气电池原子钟，并可作为适合于生成冷原子样品的微型平台。 （C）2016美国眼镜学会

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