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首页> 外文期刊>Physica, B. Condensed Matter >Primary defect transformations in high-resistivity p-type silicon irradiated with electrons at cryogenic temperatures
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Primary defect transformations in high-resistivity p-type silicon irradiated with electrons at cryogenic temperatures

机译:低温下电子辐照的高电阻率p型硅的主要缺陷转变

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摘要

It has been revealed that self-interstitials formed under low intensity electron irradiation in high resistivity p-type silicon can be retained frozen up to room temperature. Low thermal mobility of the self-interstitials suggests that Frenkel pairs in silicon can be stable at temperatures of about or higher than 100 K. A broad DLTS peak with activation energy of 0.14–0.17 eV can be identified as related to Frenkel pairs. This peak anneals out at temperatures of 120140 K. Experimental evidences are presented that becoming more mobile under forward current injection the self-interstitials change their charge state to a less positive one.
机译:已经发现,在高电阻率p型硅中在低强度电子辐照下形成的自填隙体可以冻结到室温。自填隙子的低热迁移率表明硅中的Frenkel对在大约或高于100 K的温度下可以保持稳定。可以确定活化能为0.14-0.17 eV的宽DLTS峰与Frenkel对有关。该峰值在120140 K的温度下退火。实验证据表明,在正向电流注入下,自填隙层的电荷状态变为较弱的正电荷,从而变得更具移动性。

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