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首页> 外文期刊>Physica, B. Condensed Matter >Study of atomic force microscopy nanoindentation for the development of nanostructures
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Study of atomic force microscopy nanoindentation for the development of nanostructures

机译：原子力显微镜纳米压痕技术研究纳米结构的发展

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摘要

We have studied the fabrication of atomic force microscope (AFM) based nanotemplates using electrically controlled indentation (ECI) and a composite barrier (photoresist/alumina) that is resistant to the lithography process and presents good mechanical properties for indentation. The indentation process is affected by several factors such as the indentation speed, the trigger voltage and the barrier type. We have used the nanotemplate technique to fabricate small gold-gold nanocontacts (1-10nm). In this limit, the size of the contacts that is obtained through the indentation process seems to be stochastic. However, low dimension, clean metallic contacts were achieved with high temporal stability and compatible with low temperature measurements. The fabricated nanotemplates are versatile and can be used in a wide range of applications, from nanojunctions to connecting a single nano-object. Small area metallic contacts can be used to study spin injection or ballistic transport.
机译：我们已经研究了基于原子力显微镜（AFM）的纳米模板的制造，该模板使用电控压痕（ECI）和可抵抗光刻工艺并表现出良好压痕机械性能的复合阻挡层（光致抗蚀剂/氧化铝）。压痕过程受多种因素影响，例如压痕速度，触发电压和势垒类型。我们已经使用了nanotemplate技术来制造小的金金纳米触点（1-10nm）。在此限制下，通过压痕过程获得的触点尺寸似乎是随机的。但是，实现了具有高时间稳定性并与低温测量兼容的低尺寸，清洁的金属触点。制成的纳米模板用途广泛，可用于从纳米结到连接单个纳米物体的广泛应用。小面积的金属触点可用于研究自旋注入或弹道运输。

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