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首页> 外文期刊>Physica, B. Condensed Matter >Unified phase-field model for epitaxial growth of multi-scale three-dimensional islands on insulating surfaces
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Unified phase-field model for epitaxial growth of multi-scale three-dimensional islands on insulating surfaces

机译：绝缘表面上多尺度三维岛外延生长的统一相场模型

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In this paper we present a unified phase-field model for non-equilibrium growths of various three-dimensional metal islands on insulating surfaces. We introduce a phase-field variable to distinguish theisland from the non-island regions and substrate and a density variable to describe local densityof deposited adatoms. Two partial differential equations with appropriate boundary conditions, as thegoverning equations, are used to describe the evolution of the three-dimensional metal islands and thediffusion of adatoms. We solve the equations by using an adaptive mesh refinement method so that wecan simulate the non-equilibrium growth of three-dimensional metal islands from tens of nanometersto several micrometers. We investigate the dependence of simulated results on the model parametersand experimental conditions. Equilibrium shape of such islands can be obtained through sufficient post-deposition relaxation. Experimental trends of island size and shape on various scales are obtainedwith reasonable parameters. This method should be a good approach to non-equilibrium growths ofmulti-scale three-dimensional metal islands.
机译：在本文中，我们为绝缘表面上各种三维金属岛的非平衡生长提供了一个统一的相场模型。我们引入了一个相场变量来区分岛和非岛区域以及基底，以及一个密度变量来描述沉积的原子的局部密度。用两个具有适当边界条件的偏微分方程作为控制方程来描述三维金属岛的演化和吸附原子的扩散。我们通过使用自适应网格细化方法来求解方程，以便可以从数十纳米到几微米模拟三维金属岛的非平衡生长。我们研究了模拟结果对模型参数和实验条件的依赖性。这些岛的平衡形状可以通过充分的沉积后弛豫来获得。利用合理的参数可以得到各种尺度上岛的大小和形状的实验趋势。该方法应该是解决多尺度三维金属岛非平衡增长的好方法。

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