首页> 外文期刊>Journal of Applied Polymer Science >Effects of the Binder Polymer and Powder Type on theResolution and Edge Curl of a Silver Electrode Formed bya Photolithographic Process
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Effects of the Binder Polymer and Powder Type on theResolution and Edge Curl of a Silver Electrode Formed bya Photolithographic Process

机译:粘合剂聚合物和粉末类型对光刻工艺形成的银电极的分辨率和卷曲度的影响

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摘要

Silver (Ag) electrodes with a high resolutionand a low edge curl dimension for plasma display panelswere successfully fabricated through a photolithographic pro-cess using photosensitive Ag pastes with several polymericbinders. The gap and line resolutions of the photosensitive Agpastes were examined as a function of the molecular weightsand acid values of the acrylic binders with carboxylic acidgroups. The effect on the formation of edge curls was alsoinvestigated with dry- and wet-processed Ag powders. Agelectrode patterns with a line resolution of 20 μm, a gap reso-
机译:通过使用带有几种聚合物粘合剂的感光性银浆通过光刻工艺成功地制造了用于等离子显示面板的具有高分辨率和低边缘卷曲尺寸的银(Ag)电极。检查了感光性Agpaste的间隙和线分辨率,它是具有羧酸基的丙烯酸粘合剂的分子量和酸值的函数。还用干法和湿法加工的银粉研究了对边缘卷曲形成的影响。具有20μm线分辨率,间隙分辨率的Ag电极图案

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