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首页> 外文期刊>Journal of Materials Processing Technology >Characteristics of abrasive slurry jet micro-machining: A comparison with abrasive air jet micro-machining
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Characteristics of abrasive slurry jet micro-machining: A comparison with abrasive air jet micro-machining

机译：磨料喷射微加工的特点：与磨料喷射微加工的比较

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Abrasive slurry jet micro-machining (ASJM) uses a well-defined jet of abrasive slurry to erode features in a solid target. Compared with abrasive water jet machining (AWJM), the present ASJM system operates at pressures that are roughly two orders of magnitude lower and uses a premixed slurry of relatively low concentration. The objective of the present study was to gain a better understanding of the mechanics of erosion in ASJM by comparing its performance in the micro-machining of holes and channels in borosilicate glass with that of abrasive air jet micro-machining (AJM), a process that is simpler and relatively well understood. A new ASJM system was developed and used to machine blind holes and smooth channels of relatively uniform depth that did not suffer from the significant waviness previously reported in the literature. The effect of particle velocity, particle concentration, jet traverse speed and jet impact angle were examined. A direct comparison of ASJM and AJM results was possible since novel measurements of the crushing strength of the aluminum oxide abrasive particles used in both experiments proved to be unaffected by water. Brittle erosion was shown to be the dominant material removal mechanism in both ASJM and AJM in spite of the significant flow-induced decrease in the local impact angles of many of the particles in ASJM. A new model of the rapid particle deceleration near the target surface helped explain the much smaller erosion rates of ASJM compared with those in AJM. The modeling of the erosion process during the micro-machining of channels showed that the effect of the local impact angle at the leading edge of the advancing jet was much more significant in ASJM than in AJM, primarily due to the narrower focus of the jet impact zone in ASJM. The differences in the water and air flow fields and associated particle trajectories were used to explain the steeper side walls and flatter bottoms of the holes and channels machined with unmasked ASJM compared to those with masked AJM. The respective structures of the water and air jets also explained the much sharper definition of the edges of these features using ASJM compared with maskless AJM. The results of the study show that ASJM can be used to accurately micro-machine channels and holes with a width of 350-500 μm and an aspect ratio of 0.5-1.3 without the use of masks.
机译：磨料浆喷射微加工（ASJM）使用定义明确的磨料浆喷射来侵蚀固体靶材中的特征。与磨料水射流加工（AWJM）相比，本ASJM系统在大约低两个数量级的压力下运行，并使用浓度相对较低的预混合浆料。本研究的目的是通过比较其在硼硅玻璃的孔和通道的微加工性能与磨料喷射微加工（AJM）的性能方面更好地了解ASJM的腐蚀机理比较简单并且相对容易理解。开发了一种新的ASJM系统，该系统用于加工相对均匀深度的盲孔和平滑通道，而不会受到先前文献中报道的明显波纹的影响。考察了粒子速度，粒子浓度，射流横移速度和射流冲击角的影响。直接比较ASJM和AJM结果是可能的，因为两个实验中使用的氧化铝磨料颗粒的抗碎强度的新测量结果均证明不受水的影响。尽管ASJM和AJM中许多颗粒的局部流动角显着减少，但脆性腐蚀是ASJM和AJM中主要的材料去除机制。一种新的目标表面附近粒子快速减速的模型有助于解释ASJM的腐蚀速率比AJM的腐蚀速率小得多。对通道微细加工过程中侵蚀过程的建模表明，在进给射流前缘处的局部冲击角的影响在ASJM中比在AJM中更为重要，这主要是由于射流冲击的焦点更窄ASJM中的区域。水和空气流场以及相关粒子轨迹的差异被用来解释与未掩盖的AJM相比，未掩盖的ASJM加工的孔和通道的侧壁更陡，底部更平坦。与无掩膜AJM相比，水射流和空气射流的各自结构还解释了使用ASJM对这些特征的边缘的清晰得多的定义。研究结果表明，无需使用掩膜，ASJM可用于精确地微加工宽度为350-500μm，纵横比为0.5-1.3的通道和孔。

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