Significantly enhanced functional properties have been observed in lead zirconate titanate thick films when sintered for 1 min using focussed infrared irritation from a halogen bulb. By scanning the heat affected zone similar enhancements in properties were obtained when scan speeds of between 0.06 and 0.16 mm/s were used. Scanning at slower speeds resulted in incomplete sintering while sintering at higher speeds resulted in a degradation of properties. Where enhancements in properties were observed relative permittivity was increased from between 200 and 300 to 600 and 700. Piezoelectric properties (d_ (33)) were observed to increase from 20-30 pC/N to between 60 and 80 pC/N. The enhancement in properties were attributed to the improved densification and grain growth brought about by the high ramp rates and short sintering times achievable using focussed IR irradiation and the ability of the surrounding film to accommodate the sintering strains. Combining multiple scan lines in a rastering pattern failed to yield similar improvements in properties due to effects of stopping and restarting the sintering process in the scan overlap regions and the inability of the film to accommodate the sintering strains across large areas.
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机译:当使用卤素灯泡的聚焦红外光烧结1分钟后,锆钛酸铅厚膜中的功能特性得到了显着增强。通过扫描热影响区,当使用0.06-0.16 mm / s的扫描速度时,可以获得类似的性能增强。以较低的速度进行扫描导致烧结不完全,而以较高的速度进行烧结导致性能降低。在观察到性能增强的地方,相对介电常数从200至300增加到600至700。压电性能(d_(33))从20-30 pC / N增加到60至80 pC / N。性能的提高归因于高聚焦速率和较短的烧结时间(使用聚焦红外辐射可达到的)和周围薄膜适应烧结应变的能力,从而改善了致密化和晶粒长大。由于在扫描重叠区域中停止和重新开始烧结过程的影响以及膜无法适应大面积的烧结应变,以光栅图案组合多条扫描线未能在性能上产生相似的改善。
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