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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Angle-dependent dip-coating technique (ADDC) an improved method for the production of optical filters
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Angle-dependent dip-coating technique (ADDC) an improved method for the production of optical filters

机译：角度相关浸涂技术（ADDC），一种用于生产滤光片的改进方法

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The production of high quality interference filters by a sol-gel coating process (e.g., dip-coating) with large areas of flat or shaped surfaces and with tubes has been developed. The angle dependent dip-coating process (ADDC) is an improved dip-coating technique method for the production of optical filters. In contrast to conventional dip-coating (DC), the substrate is withdrawn from the coating solution at an angle of inclination, that offers advantages for the production of optical interference tilters. Thereby, the two surfaces of the substrate are coated with different film thicknesses. To gain full control over the individual layer thicknesses, reaching from 20 nm to 160 nm, it is necessary to vary the following process parameters: lifting speed (upsilon) of the substrate, angle of inclination (phi) (Fig. 2c) and concentration of the dipping solution (c). An ADDC long pass filter produced in 10 coating steps reaches the same optical performance as a conventional DC filter made in Ih steps. The possibility to improve quality demonstrate a second example: a commercial DC beamsplitter can be improved with respect to the flatness of transmission and reflection curves when being produced in four steps by ADDC instead of right steps by DC. Furthermore, ADDC offers the possibility to fabricate even narrow band pass filters, which are naturally difficult to obtain by conventional DC. (C) 1997 Elsevier Science B.V.
机译：已经开发了通过溶胶-凝胶涂覆工艺（例如，浸涂）生产具有大面积的平坦或成形表面并具有管的高质量干涉滤光片。角度相关浸涂工艺（ADDC）是一种用于生产滤光片的改进的浸涂技术方法。与传统的浸涂（DC）相比，基材以一定的倾斜角度从涂料溶液中抽出，这为生产光学干涉倾斜器提供了优势。由此，基板的两个表面涂覆有不同的膜厚度。为了完全控制从20 nm到160 nm的各个层的厚度，必须更改以下工艺参数：基板的提升速度（upsilon），倾斜角（phi）（图2c）和浓度溶液（c）。在10个涂覆步骤中生产的ADDC长通滤波器与在1h步骤中制造的常规DC滤波器具有相同的光学性能。改善质量的可能性证明了第二个例子：商用DC分束器在由ADDC分四步生产而不是由DC分步生产时，可以改善透射和反射曲线的平坦度。此外，ADDC提供了制造窄带通滤波器的可能性，而这通常是传统DC很难获得的。 （C）1997年Elsevier Science B.V.

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