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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Fabrication and ionic conductivity of amorphous Li-Al-Ti-P-O thin film
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Fabrication and ionic conductivity of amorphous Li-Al-Ti-P-O thin film

机译：非晶态Li-Al-Ti-P-O薄膜的制备及离子电导率

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Li~+ ion conducting Li-Al-Ti-P-O thin films were fabricated on ITO-glass substrates at various temperatures from 25 to 400 °C by RF magnetron sputtering method. When the substrate temperature is higher than 300 °C, severe destruction of ITO films were confirmed by XRD (X-ray diffraction) and the abrupt transformation of one semi-circle into two semi-circles on the impedance spectra. These as-deposited Li-Al-Ti-P-O solid state electrolyte thin films have an amorphous structure confirmed by XRD and a single semicircle on the impedance spectra. Good transmission higher than 80% in the visible light range of these electrolyte thin films can fulfill the demand of electro-chromic devices. Field emission scanning electron microscopy and atomic force microscopy showed the denser, smoother and more uniform film structure with the enhanced substrate temperature. Measurements of impedance spectra indicate that the gradual increased conductivity of these Li-Al-Ti-P-O thin films with the elevation of substrate temperature from room temperature to 300 °C is originated from the increase of the pre-exponential factor (σ_0). The largest Li-ion conductivity can come to 2.46 × 10~(- 5) S cm~(- 1). This inorganic solid lithium ion conductor film will have a potential application as an electrolyte layer in the field such as lithium batteries or all-solid-state EC devices.
机译：采用射频磁控溅射法，在25〜400℃的不同温度下，在ITO玻璃基板上制备了Li〜+离子导电Li-Al-Ti-P-O薄膜。当衬底温度高于300°C时，通过XRD（X射线衍射）和阻抗谱上一个半圆突然转变为两个半圆的结果证实，ITO膜受到严重破坏。这些沉积的Li-Al-Ti-P-O固态电解质薄膜具有通过XRD确认的非晶结构和阻抗谱上的单个半圆。这些电解质薄膜在可见光范围内的透射率高于80％，可以满足电致变色器件的需求。场发射扫描电子显微镜和原子力显微镜显示，随着衬底温度的升高，薄膜结构更致密，更光滑，更均匀。阻抗谱的测量表明，随着基底温度从室温升高到300°C，这些Li-Al-Ti-P-O薄膜的电导率逐渐增加，其原因是前指数因子（σ_0）的增加。最大的锂离子电导率可达到2.46×10〜（-5）S cm〜（-1）。该无机固体锂离子导体膜在诸如锂电池或全固态EC器件的领域中具有作为电解质层的潜在应用。

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