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首页> 外文期刊>Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites >Preparation and characterization of ZnO-TiO_2 films obtained by sol-gel method
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Preparation and characterization of ZnO-TiO_2 films obtained by sol-gel method

机译：溶胶-凝胶法制备ZnO-TiO_2薄膜及其表征

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摘要

The sol-gel route has been applied to obtain ZnO-TiO_2 thin films. For comparison, pure TiO_2 and ZnO films are also prepared from the corresponding solutions. The films are deposited by a spin-coated method on silicon and glass substrates. Their structural and vibrational properties have been studied as a function of the annealing temperatures (400-750 °C). Pure ZnO films crystallize in a wurtzite modification at a relatively low temperature of 400 °C, whereas the mixed oxide films show predominantly amorphous structure at this temperature. XRD analysis shows that by increasing the annealing temperatures, the sol-gel Zn/Ti oxide films reveal a certain degree of crystallization and their structures are found to be mixtures of wurtzite ZnO, Zn_2TiO_4, anatase TiO_2 and amorphous fraction. The XRD analysis presumes that Zn_2TiO_4 becomes a favored phase at the highest annealing temperature of 750 °C. The obtained thin films are uniform with no visual defects. The optical properties of ZnO-TiO _2 films have been compared with those of single component films (ZnO and TiO_2). The mixed oxide films present a high transparency with a slight decrease by increasing the annealing temperature.
机译：溶胶-凝胶法已用于获得ZnO-TiO_2薄膜。为了进行比较，还从相应的溶液中制备了纯TiO_2和ZnO薄膜。膜通过旋涂法沉积在硅和玻璃基板上。已经研究了它们的结构和振动特性与退火温度（400-750°C）的关系。纯ZnO薄膜在400摄氏度的较低温度下以纤锌矿变型结晶，而混合氧化物薄膜在该温度下主要显示出非晶态结构。 XRD分析表明，通过提高退火温度，溶胶-凝胶Zn / Ti氧化物薄膜具有一定的结晶度，其结构为纤锌矿型ZnO，Zn_2TiO_4，锐钛矿型TiO_2和非晶态组分的混合物。 XRD分析推测Zn_2TiO_4在750℃的最高退火温度下成为有利相。所获得的薄膜是均匀的，没有视觉缺陷。 ZnO-TiO _2薄膜的光学性能已与单组分薄膜（ZnO和TiO_2）的光学性能进行了比较。通过提高退火温度，混合氧化物膜呈现出高透明性并且略有降低。

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