...
  • 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Journal of Physics, D. Applied Physics: A Europhysics Journal >Transport control of dust particles via the electrical asymmetry effect: Experiment, simulation and modelling
【24h】

Transport control of dust particles via the electrical asymmetry effect: Experiment, simulation and modelling

机译：通过电非对称效应控制粉尘颗粒的传输：实验，仿真和建模

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The control of the spatial distribution of micrometre-sized dust particles in capacitively coupled radio frequency discharges is relevant for research and applications. Typically, dust particles in plasmas form a layer located at the sheath edge adjacent to the bottom electrode. Here, a method of manipulating this distribution by the application of a specific excitation waveform, i.e. two consecutive harmonics, is discussed. Tuning the phase angle θ between the two harmonics allows one to adjust the discharge symmetry via the electrical asymmetry effect (EAE). An adiabatic (continuous) phase shift leaves the dust particles at an equilibrium position close to the lower sheath edge. Their levitation can be correlated with the electric field profile. By applying an abrupt phase shift the dust particles are transported between both sheaths through the plasma bulk and partially reside at an equilibrium position close to the upper sheath edge. Hence, the potential profile in the bulk region is probed by the dust particles providing indirect information on plasma properties. The respective motion is understood by an analytical model, showing both the limitations and possible ways of optimizing this sheath-to-sheath transport. A classification of the transport depending on the change in the dc self-bias is provided, and the pressure dependence is discussed.
机译：电容耦合射频放电中微米级灰尘颗粒的空间分布控制与研究和应用有关。通常，等离子体中的尘埃颗粒在靠近底部电极的护套边缘处形成一层。在此，讨论了通过施加特定的激励波形即两个连续的谐波来操纵该分布的方法。通过调节两个谐波之间的相角θ，可以通过电非对称效应（EAE）调整放电对称性。绝热（连续）相移将粉尘颗粒留在靠近下部护套边缘的平衡位置。它们的悬浮可以与电场分布相关。通过施加突然的相移，粉尘颗粒在两个护套之间通过等离子体传输，并部分地停留在靠近上护套边缘的平衡位置。因此，主体区域中的电势分布被尘粒探测，从而提供了有关等离子体特性的间接信息。通过分析模型可以理解相应的运动，该模型显示了优化鞘到鞘运输的局限性和可能的​​方式。根据直流自偏置的变化提供了输运的分类，并讨论了压力依赖性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号