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DC breakdown in low-pressure CF4

机译:低压CF4中的直流击穿

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This paper reports the results of studying dc breakdown in low-pressure CF4 gas. We measured the breakdown curves over a broad range of values of CF4 pressure and interelectrode distance L. Two breakdown modes were observed at different CF4 pressures. When the values of the product of gas pressure and gap width are moderate, pL < 2 Torr cm, a balance is achieved between molecular ionization through electron impact and electron escape to the anode and tube walls due to the drift in the electric field and diffusion, respectively, whereas the attachment of free electrons to CF4 molecules does not play any role. At large values, pL > 2 Torr cm, the rate of growth of breakdown voltage with pressure essentially increases because a considerable number of electrons may be attached to gas molecules.
机译:本文报告了研究低压CF4气体中直流击穿的结果。我们在很宽的CF4压力和电极间距离L值范围内测量了击穿曲线。在不同的CF4压力下观察到两种击穿模式。当气体压力和间隙宽度的乘积值适中,pL <2 Torr cm时,由于电场的漂移和扩散,通过电子撞击的分子电离与电子逃逸到阳极和管壁之间达到了平衡。分别,而自由电子对CF4分子的附着没有任何作用。在较大的值(pL> 2 Torr cm)下,击穿电压随压力的增长速率实质上会增加,因为可能会有大量电子附着在气体分子上。

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