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Nano-imprinting potential of magnetic FeCo-based metallic glass

机译：基于磁性FECO的金属玻璃的纳米印迹电位

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Fabrication of magnetic nanostructures at low cost is strongly desired for applications such as sensors, actuators, magnetic memory, etc. In conventional nano-patterning techniques, the magnetic field of a magnetic material interferes with the patterning process, making nano-patterning challenging. Here, we report on the low cost patterning potential of FeCo-based magnetic metallic glass using a nano-imprinting technique. We show that out of a large number of magnetic metallic glasses, Fe40Co35P10C10B5 glassy alloy exhibits high saturation magnetic flux density (B-s similar to 1.24 T), a large super-cooled liquid temperature range (Delta T-x similar to 49 degrees C), and a relatively low glass transition temperature (T-g similar to 430 degrees C) with good thermal stability. The quasi-static viscosity (similar to 10(8) Pa. s at a heating rate of similar to 40 degrees C min(-1)) in Delta T-x, which is one of the most important parameters for nano-imprinting, is lowest among the reported magnetic metallic glasses. The deformability of this magnetic alloy is similar to the well-known non-magnetic metallic glasses, which can be patterned to a few tens of nanometers. Crystallization of Fe40Co35P10C10B5 glassy alloy leads to the precipitation of a high B-s FeCo phase that may exhibit high magnetocrystalline anisotropy. Based on detailed investigations of structural, thermal, and magnetic behavior, along with imprinting experiments, we show that the Fe40Co35P10C10B5 glassy alloy is the most desirable material for making various nano-patterns with tailorable magnetic properties.
机译：在传统的纳米图案化技术中，诸如传感器，致动器，磁存储器等的应用，强烈需要以低成本制造低成本的磁性纳米结构，磁性材料的磁场干扰了图案化过程，使纳米图案化挑战。在此，我们使用纳米印迹技术报告FECO基磁性金属玻璃的低成本图案化电位。我们表明，除了大量的磁性金属玻璃中，Fe40Co35P10C10B5玻璃合金具有高饱和磁通密度（BS类似于1.24 T），具有大的超冷却液温度范围（ΔTX类似于49℃），以及一个相对较低的玻璃化转变温度（Tg类似于430℃），具有良好的热稳定性。在Delta Tx中的准静态粘度（类似于10（8）次PA.S以类似于40摄氏度（-1））的加热速率，这是纳米压印的最重要参数之一，是最低的在报告的磁性金属玻璃中。该磁性合金的可变形性类似于众所周知的非磁性金属玻璃，其可以将其图案化到几十纳米。 Fe40CO35P10C10B5玻璃合金的结晶导致高B-S FECO相的沉淀，其可表现出高磁镀各向异性。基于结构，热和磁性行为的详细研究，以及压印实验，我们表明Fe40CO35P10C10B5玻璃合金是制备具有可批准磁性的各种纳米图案的最期望的材料。

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