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Laser micro-structured pressure sensor with modulated sensitivity for electronic skins

机译：激光微结构压力传感器，具有电子皮肤的调制灵敏度

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摘要

Micro-structured pressure sensors with broad pressure sensing range, high sensitivity and rapid response speeds are highly desired for epidermal electronic skin. The widely used methods to fabricate micro-structured pressure sensors are lithography and biomaterial-replicating, which are either complex in preparation procedure or uncontrollable in micro-structure morphology. In this work, laser micro-structured wearable pressure sensors with high-performance are developed for epidermal electronic skin. Laser micro-engineering, with scalability, high-efficiency, and controllability, is employed to prepare a series of micro-structures on elastomers for modulating and enhancing the sensitivity of the sensors. The device with micro-domes owns a sensitivity of -1.82 kPa(-1), which is approximately 17 times better than the one based on long micro-ridges. Due to the reduced viscous properties of the elastomers by laser micro-engineering, the sensor based on micro-domes demonstrates rapid response/relaxation speeds of 0.036 and 0.052 s, respectively, and a detection limit of 0.001 kPa. Additionally, the device has a good durability (6,000 cycles) with a repeatability deviation of 1.44%, confirming its stability. Combined with near field communication technology, the sensor has been investigated as epidermal electronic skin for health monitoring.
机译：对于表皮电子皮肤，非常需要具有宽压力传感范围，高灵敏度和快速响应速度的微结构压力传感器。用于制造微结构压力传感器的广泛使用的方法是光刻和生物材料复制，其在制备程序中是复合物或在微结构形态中不可控制的。在这项工作中，开发了具有高性能的激光微结构可穿戴压力传感器，用于表皮电子皮肤。激光微型工程，具有可扩展性，高效率和可控性，用于制备在弹性体上的一系列微结构，用于调节和增强传感器的灵敏度。具有微圆顶的装置拥有-1.82 kPa（-1）的灵敏度，比基于长的微脊的敏感度约17倍。由于激光微型工程的弹性体的粘性特性降低，基于微圆顶的传感器分别显示出快速的响应/弛豫速度为0.036％和0.052秒，检出的限制为0.001kPa。另外，该装置具有良好的耐久性（6,000个循环），可重复偏差为1.44％，确认其稳定性。结合近场通信技术，传感器已被调查为表皮电子皮肤以进行健康监测。

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