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首页> 外文期刊>Nanotechnology >Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators
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Graphene as an active virtually massless top electrode for RF solidly mounted bulk acoustic wave (SMR-BAW) resonators

机译：石墨烯作为用于RF稳定安装的散装声波（SMR-BAW）谐振器的有源几乎无阻的顶电极

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摘要

Mechanical and electrical losses induced by an electrode material greatly influence the performance of bulk acoustic wave (BAW) resonators. Graphene as a conducting and virtually massless 2D material is a suitable candidate as an alternative electrode material for BAW resonators which reduces electrode induced mechanical losses. In this publication we show that graphene acts as an active top electrode for solidly mounted BAW resonators (BAW-SMR) at 2.1 GHz resonance frequency. Due to a strong decrease of mass loading and its remarkable electronic properties, graphene demonstrates its ability as an ultrathin conductive layer. In our experiments we used an optimized graphene wet transfer on aluminum nitride-based solidly mounted resonator devices. We achieved more than a triplication of the resonator's quality factor Q and a resonance frequency close to an 'unloaded' resonator without metallization. Our results reveal the direct influence of both, the graphene quality and the graphene contacting via metal structures, on the performance characteristic of a BAW resonator. These findings clearly show the potential of graphene in minimizing mechanical losses due to its virtually massless character. Moreover, they highlight the advantages of graphene and other 2D conductive materials for alternative electrodes in electroacoustic resonators for radio frequency applications.
机译：电极材料引起的机械和电损耗大大影响了散装声波（BAW）谐振器的性能。石墨烯作为导电和几乎无麻的2D材料是合适的候选者作为凸抗谐振器的替代电极材料，其降低了电极诱导的机械损失。在本出版物中，我们表明石墨烯作为在2.1GHz共振频率下牢固安装的凸矛谐振器（BAW-SMR）的活性顶电极。由于质量负荷的强烈降低及其显着的电子性质，石墨烯表现出其作为超薄导电层的能力。在我们的实验中，我们在氮化铝基固体安装谐振器装置上使用了优化的石墨烯湿转移。我们实现了谐振器的质量因子Q的三倍，并且靠近没有金属化的“卸载”谐振器的共振频率。我们的结果揭示了石墨烯质量和通过金属结构接触的直接影响，在BAW谐振器的性能特征上。这些发现清楚地表明了石墨烯在最小化由于其几乎无质量的机械损失方面的潜力。此外，它们突出了石墨烯和其他2D导电材料的优点，用于射声谐振器中的替代电极，用于射频应用。

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