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Self-assembly patterning of ultrafine zirconia nanocrystal films fabricated on chemically patterned templates

机译:在化学图案化模板上制造的超细氧化锆纳米晶膜的自组装图案化

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摘要

Ultra-thin zirconia (ZrO2) nanocrystal films were fabricated by using a controlled dip-coating process. ZrO2 nanocrystals possess a cubic crystalline phase and large surface-to-volume area. The film composite with only several layers of nanocrystals were obtained by controlling the withdrawal speed and mass concentration of the colloidal solution. The optical properties of ZrO2 nanocrystal films were accessed by UV-vis spectroscopy, which indicated the dense and uniform structure of the nanocrystal films The high reflection index suggested that the films could be used in the reflection coating industry. Furthermore, a micro-pattern of self-assembled monolayers of silane molecular was used as a chemical mold for selective deposition of ZrO2 nanocrystals. As a result, a self-assembly patterning of ZrO2 nanocrystals with a neat edge was fabricated on silicon substrate. The low-cost fabricating method is compatible with conventional very-large-scale integration processes and can be extended to other kinds of nanocrystals.
机译:通过使用受控的浸涂方法制造超薄氧化锆(ZrO2)纳米晶体膜。 ZrO2纳米晶体具有立方晶相和大面对体积面积。通过控制胶体溶液的抽出速度和质量浓度,仅获得几层纳米晶体的膜复合物。通过UV-Vis光谱进入ZrO2纳米晶体膜的光学性质,其指示纳米晶体膜的致密和均匀结构,高反射指数表明薄膜可用于反射涂料工业中。此外,使用硅烷分子的自组装单层的微观图案作为化学模具,用于选择性沉积ZrO2纳米晶体。结果,在硅衬底上制造具有纯边缘的ZrO2纳米晶体的自组装图案化。低成本制造方法与传统的非常大规模的集成过程兼容,并且可以扩展到其他类型的纳米晶体。

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