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Filtration-guided assembly for patterning one-dimensional nanostructures

机译:用于图案化一维纳米结构的过滤引导组件

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Tremendous progress has been made in synthesizing various types of one-dimensional (1D) nanostructures (NSs), such as nanotubes and nanowires, but some technical challenges still remain in the deterministic assembly of the solution-processed 1D NSs for device integration. In this work we investigate a scalable yet inexpensive nanomaterial assembly method, namely filtration-guided assembly (FGA), to place nanomaterials into desired locations as either an individual entity or ensembles, and form functional devices. FGA not only addresses the assembly challenges but also encompasses the notion of green nanomanufacturing, maximally utilizing nanomaterials and eliminating a waste stream of nanomaterials into the environment. FGA utilizes selective filtration of 1D NSs through the open windows on the nanoporous filter membrane whose surface is patterned by a polymer mask for guiding the 1D NS deposition. The modified soft-lithographic technique called blanket transfer (BT) is employed to create the various photoresist patterns of sub-10-micron resolution on the nanoporous filter membrane like mixed cellulose acetate. We use single-walled carbon nanotubes (SWCNTs) as a model 1D NS and demonstrate the fabrication of an array pattern of homogeneous 1D NS network films over an area of 20 cm(2) within 10 min. The FGA-patterned SWCNT network films are transferred onto the substrate using the adhesive-based transfer technique, and show the highly uniform film thickness and resistance measurements across the entire substrate. Finally, the electrical performance of the back-gated transistors made from the FGA and transfer method of 95% pure SWCNTs is demonstrated.
机译:在合成各种类型的一维(1D)纳米结构(NSS)(例如纳米管和纳米线)中已经进行了巨大进展,但是一些技术挑战仍然仍然存在于用于设备集成的解决方案处理的1D NSS的确定性组装中。在这项工作中,我们研究可扩展且廉价的纳米材料组装方法,即过滤引导的组件(FGA),以将纳米材料放入所需位置,作为各个实体或合奏,以及形成功能装置。 FGA不仅解决了大会挑战,而且还包括绿色纳米成形的概念,最大限度地利用纳米材料,并消除纳米材料的废物流入环境。 FGA利用通过纳米多孔过滤膜上的开口窗口的选择性过滤,其表面由聚合物掩模图案化,用于引导1D NS沉积。被称为毯式传送(BT)的改进的软光刻技术用于在纳米多孔过滤膜上产生各种光致抗蚀剂图案,如混合纤维素乙酸纤维素。我们使用单壁碳纳米管(SWCNTS)作为型号1D NS,并证明在10分钟内在20cm(2)的面积在20cm(2)面积上的阵列图案的制造。使用基于粘合剂的转移技术将FGA图案化的SWCNT网络膜转移到基板上,并在整个基板上显示出高度均匀的膜厚度和电阻测量。最后,对由FGA和95%纯SWCNTS的FGA和转移方法制成的背门控晶体管的电性能进行说明。

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