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Flexible piezoelectric nanogenerators based on a transferred ZnO nanorod/Si micro-pillar array

机译：基于转移ZnO纳米棒/ Si微柱阵列的柔性压电纳米液

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摘要

Flexible piezoelectric nanogenerators (PNGs) based on a composite of ZnO nanorods (NRs) and an array of Si micro-pillars (MPs) are demonstrated by a transfer process. The flexible composite structure was fabricated by hydrothermal growth of ZnO NRs on an electrochemically etched Si MP array with various lengths followed by mechanically delaminating the Si MP arrays from the Si substrate after embedding them in a polydimethylsiloxane matrix. Because the Si MP arrays act as a supporter to connect the ZnO NRs electrically and mechanically, verified by capacitance measurement, the output voltage from the flexible PNGs increased systematically with the increased density ZnO NRs depending on the length of the Si MPs. The flexible PNGs showed 3.2 times higher output voltage with a small change in current with increasing Si MP length from 5 to 20 mu m. The enhancement of the output voltage is due to the increased number of seriesconnected ZnO NRs and the beneficial effect of a ZnO NR/Si MP heterojunction on reducing free charge screening effects. The flexible PNGs can be attached on fingers as a wearable electrical power source or motion sensor.
机译：柔性压电纳米发电机基于ZnO纳米棒（NRS）的复合物（PNG文件）和Si微柱（MPS）的阵列被利用转印法进行证实。柔性复合结构的电化学蚀刻的Si MP阵列与各种长度，接着在聚二甲基硅氧烷基质它们嵌入后机械剥离从Si衬底在Si MP阵列上制造的ZnO卢比的水热生长。因为所述Si MP阵列充当支持物以电和机械地连接在ZnO自然保护区，通过电容测量验证，从柔性PNG图像的输出电压与所述增加的密度的ZnO卢比根据Si国会议员的长度系统地增加。柔性的PNG显示出较高的3.2倍的输出电压与在电流随Si MP长度从5至20微米的微小变化。输出电压的增强是由于串联连接的保护区的ZnO的数量增加和ZnO NR / Si的异质结MP对减少免费屏蔽效应的有益效果。柔性的PNG可以在手指作为可佩戴的电功率源或运动传感器来连接。

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