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Fabrication of air-stable, transparent Cu grid electrodes by etching through a PVA-based protecting layer patterned using a screen mesh

机译:通过使用筛网图案化的基于PVA的保护层来制造空气稳定的透明CU电网电极

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摘要

As an alternative to conventional indium-tin-oxide (ITO) electrodes, a transparent Cu grid electrode was fabricated by etching a sputtered Cu on a flexible polyethylene naphthalate film through a polyvinyl alcohol (PVA)-based protecting layer. The masking pattern of the PVA-based polymer on the Cu was generated by evaporation of an aqueous solution containing PVA-based polymers using a screen mesh as a template. The solution formed a stable liquid-bridge network between contact points of the screen mesh and the substrate after being dropped onto the mesh placed on the substrate. Drying of the solution yielded grid or dotted patterns, depending on the concentration of PVA. Etching of the Cu film covered with the PVA pattern was done with a FeCl3 methanolic solution to form a grid-patterned Cu electrode. Although some underetching was observed, adjusting the etching time gave a fine line network of Cu with the PVA coated thoroughly. The Cu grid electrode showed a transparency of 87.2 +/- 5.2% at 550 nm and 6.1 +/- 5.3 (-1), which is comparable to or greater than that of the conventional ITO. Furthermore, we found that the PVA coating barrier significantly enhanced the oxidation resistance of the Cu grid electrode.
机译:作为常规氧化铟锡(ITO)电极的替代方案,通过通过聚乙烯醇(PVA)基于保护层在柔性聚乙烯萘甲酸膜上蚀刻溅射的Cu来制造透明Cu栅极。通过蒸发含有PVA的聚合物的水溶液作为模板,通过蒸发含有PVA的聚合物的水溶液产生的PVA基聚合物的掩蔽图。溶液在屏幕网格和基板的接触点之间形成稳定的液体桥网络,并且在放置在放置在基板上的网上之后。取决于PVA的浓度,溶液的干燥产生栅格或虚线图案。用FECL3甲醇溶液覆盖用PVA图案覆盖的Cu膜的蚀刻以形成栅格图案化的Cu电极。虽然观察到一些屈样,但调整蚀刻时间,使PVA彻底涂覆的PVA精细的Cu网络。 Cu栅极在550nm和6.1 +/- 5.3(-1)的透明度为87.2 +/- 5.2%,其与常规ITO的或大于常规ITO的透明度。此外,我们发现PVA涂层屏障显着提高了Cu栅极的抗氧化性。

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  • 来源
    《RSC Advances》 |2018年第27期|共6页
  • 作者单位

    Natl Inst Adv Ind Sci &

    Technol Flexible Elect Res Ctr Tsukuba Ibaraki Japan;

    Natl Inst Adv Ind Sci &

    Technol Flexible Elect Res Ctr Tsukuba Ibaraki Japan;

    Natl Inst Adv Ind Sci &

    Technol Flexible Elect Res Ctr Tsukuba Ibaraki Japan;

    Natl Inst Adv Ind Sci &

    Technol Flexible Elect Res Ctr Tsukuba Ibaraki Japan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

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