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Fabrication of local micro-contacts to silicon solar cells by dewetting of ultrathin polymer films

机译:通过脱模超薄聚合物薄膜制备局部微触点到硅太阳能电池

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摘要

A local contact patterning process based on dewetting of 50 nm-thick polystyrene (PS) films has been developed for fabrication of silicon PERC (Passivated Emitter and Rear Cell) solar cells. Holey PS films with a random pattern of holes were prepared on dielectric passivated silicon wafers through the dewetting process, and then served as etch masks for selective plasma etching of dielectric passivation layers, in doing so metal contact patterns could be generated. The impact of local back contact formation on cell performance was studied as a function of the metallization fraction. This chemical-based patterning process, which broadens the applications of dewetting of polymer films, offers an interesting alternative to laser-based approaches as it may avoid silicon surface damage and lower the manufacturing costs. The application of this patterning technique to PERC fabrication could result in a preliminary efficiency of 13.5% with a V-oc = 655 mV and a J(sc) = 38.4 mA cm(-2). An apparent gain in conversion efficiency of 0.6% could be achieved compared to the full-area aluminum back surface field reference cell.
机译:已经开发了基于50nm厚的聚苯乙烯(PS)膜的局部接触图案化工艺用于制造硅PERC(钝化发射极和后电池)太阳能电池。在介电钝化的硅晶片上通过脱模工艺制备具有随机孔的HOLY PS膜,然后用作蚀刻掩模,用于介电钝化层的选择性等离子体蚀刻,在这样做的情况下可以产生金属接触图案。研究了局部背部接触形成对细胞性能的影响是金属化级分的函数。这种基于化学基的图案化工艺,可扩大聚合物薄膜的脱水的应用,提供了一种基于激光的方法的有趣替代品,因为它可以避免硅表面损坏并降低制造成本。该图案化技术在PERC制造中的应用可以使初步效率为13.5%,V-oc = 655 mV和j(sc)= 38.4 mA cm(-2)。与全面积铝背面场参考电池相比,可以实现转换效率的表观增益0.6%。

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  • 来源
    《RSC Advances》 |2020年第10期|共6页
  • 作者单位

    Natl Cent Univ Inst Mat Sci &

    Engn Zhongli 320 Taiwan;

    Natl Cent Univ Inst Mat Sci &

    Engn Zhongli 320 Taiwan;

    Natl Cent Univ Inst Mat Sci &

    Engn Zhongli 320 Taiwan;

    Natl Cent Univ Inst Mat Sci &

    Engn Zhongli 320 Taiwan;

    Natl Cent Univ Inst Mat Sci &

    Engn Zhongli 320 Taiwan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 化学;
  • 关键词

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