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Sensing-range-tunable pressure sensors realized by self-patterned-spacer design and vertical CNT arrays embedded in PDMS

机译：通过嵌入PDMS的自图案 - 间隔设计和垂直CNT阵列实现的传感范围可调压力传感器

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摘要

A pressure sensor design suitable for a broad sensing range with high sensitivity and good stability is highly desirable for the detection of various pressures and meeting the requirements of different applications. Herein, we report sensing-range-tunable piezoresistive pressure sensors realized by self-patterned-spacer design. In the sensors, the two CNT-array layers embedded in PDMS are separated by the proposed self-patterned spacer. With this structure, the realized sensors with large initial resistance designed show tunable response thresholds from 300 Pa to 6.5 kPa while maintaining high sensitivity, which are realized by controlling the spacer thickness and the CNT length. Besides, the vertical CNT arrays have a large specific surface area, which can dramatically change the resistance of the pressure sensors and lead to high sensitivity with nearly 50 kPa(-1). Benefiting from the designs of the self-patterned spacer and the advantageous combination of CNTs and PDMS, the pressure sensors also exhibit a rapid response/relaxation time of 24/32 ms, and good long-term stability with durability test over 10 000 loading/unloading cycles. On the other hand, the realized pressure sensors with small initial resistance designed show a typical piezoresistive characteristic. For applications, the pressure sensors with large initial resistance designed are suitable for the anti-noise applications with pressure thresholds to filter unnecessary noise and save power consumption, while the pressure sensors with small initial resistance designed show the capability of detecting mechanical forces and monitoring human physiological signals. Moreover, the self-patterned design and fabrication method of the spacers also show potentials to be applied in the existing works to further enhance or adjust the performance of those pressure sensors, showing great flexibility. This design demonstrates great potentials to be applied in future advanced flexible wearable systems such as health monitoring, human-machine interaction and the Internet of Things.
机译：对于具有高灵敏度和良好稳定性的宽度传感范围的压力传感器设计非常希望检测各种压力并满足不同应用的要求。这里，我们报告了通过自图案间隔设计实现的感测范围可调压阻式压力传感器。在传感器中，嵌入在PDMS中的两个CNT阵列层由所提出的自图案垫片分开。利用这种结构，具有大的初始电阻的实现传感器，设计了从300Pa到6.5kPa的可调响应阈值，同时保持高灵敏度，通过控制间隔厚度和CNT长度来实现。此外，垂直CNT阵列具有大的比表面积，可以显着改变压力传感器的电阻，并导致高灵敏度，近50kPa（-1）。受益于自图案化间隔物的设计和CNT和PDMS的有利组合，压力传感器还表现出快速的响应/弛豫时间为24/32ms，并且具有超过10 000升起的耐久性测试的良好的长期稳定性/卸载周期。另一方面，具有小初始电阻的实现压力传感器设计了典型的压阻特性。对于应用，具有大型初始电阻的压力传感器适用于具有压力阈值的抗噪声应用，以过滤不必要的噪声并节省功耗，而具有小初始电阻的压力传感器旨在显示检测机械力和监测人的能力生理信号。此外，间隔物的自图案设计和制造方法还示出了在现有工程中应用的电位，以进一步增强或调整这些压力传感器的性能，显示出具有很大的灵活性。这种设计表明，在未来的先进灵活可穿戴系统中应用的巨大潜力，如健康监测，人机互动和事物互联网。

著录项

  • 来源
    《RSC Advances》 |2020年第55期|共8页
  • 作者

    Xie Chao; Zhang Min; Du Wei; Zhou Changjian; Xiao Ying; Zhang Shuo; Chan Mansun;

  • 作者单位

    Peking Univ Shenzhen Grad Sch Sch Elect &

    Comp Engn Shenzhen 518055 Peoples R China;

    Peking Univ Shenzhen Grad Sch Sch Elect &

    Comp Engn Shenzhen 518055 Peoples R China;

    South China Univ Technol Sch Elect &

    Informat Guangzhou 510641 Peoples R China;

    South China Univ Technol Sch Elect &

    Informat Guangzhou 510641 Peoples R China;

    Hong Kong Univ Sci &

    Technol Dept Elect &

    Comp Engn Hong Kong Peoples R China;

    Peking Univ Shenzhen Grad Sch Sch Elect &

    Comp Engn Shenzhen 518055 Peoples R China;

    Hong Kong Univ Sci &

    Technol Dept Elect &

    Comp Engn Hong Kong Peoples R China;

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  • 正文语种 eng
  • 中图分类 化学;
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