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首页> 外文期刊>RSC Advances >Batch microfabrication and testing of a novel silicon-base miniaturized reference electrode with an ion-exchanging nanochannel array for nitrite determination
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Batch microfabrication and testing of a novel silicon-base miniaturized reference electrode with an ion-exchanging nanochannel array for nitrite determination

机译：具有离子交换纳米通道阵列的新型硅基小型化参考电极的分批微制造和测试，用于亚硝酸盐测定

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摘要

The reference electrode (RE) provides a stable potential for electrochemical detection; therefore, the RE plays an important role in environmental monitoring. In this paper, a novel batch of microfabricated silicon-base miniaturized Ag/AgCl RE was reported. A specially designed mini-tank for saturated KCl solution storage and a nanochannel array for ion-exchange were fabricated on a 4 inch (100) silicon wafer using a two-step KOH anisotropic etching process. An Ag/AgCl electrode was fabricated on a 4 inch Pyrex 7740 glass substrate. Finally, the finished silicon and glass substrates were anode bonded to form the entire system. By comparing with a conventional solid-state Ag/AgCl RE in electrochemical microsensors, a pre-packaged saturated KCl solution in the mini-tank provided a stable working environment for the Ag/AgCl electrode to ensure a constant reference potential. Compared with a routine glass-structured RE and by replacing the ion-exchange membrane with a nanochannel array, the miniaturized RE achieved a longer lifetime. The size of the finished miniaturized RE electrode was 11 mm x 14 mm. The reference potential variation was only 0.1 mV under continuous testing for 3000 s. The standard deviation in the reference potential was only 1.314 mV in different Na2SO4 buffer concentrations ranging from 3 mM to 30 mM. To verify the practicality of the novel silicon-base miniaturized RE, the fabricated RE was applied to measure the amount of nitrite in a water sample and achieved a better linearity of R-2 = 0.998. This miniaturized RE showed better reference potential stability and consistency because of the batch fabrication technique. This novel strategy for the design and manufacture of the miniaturized RE shows a bright future in the wide use of electrochemical sensors in online monitoring of water pollutants.
机译：参考电极（RE）提供了电化学检测的稳定电位;因此，重申在环境监测中发挥着重要作用。本文报道了一种新型微生物硅基小型化Ag / AgCl Re的批次。使用两步KOH各向异性蚀刻方法在4英寸（100）硅晶片上制造用于饱和KCl溶液储存的特殊设计的微型罐和用于离子交换的纳米通道阵列。在4英寸Pyrex 7740玻璃基板上制造Ag / AgCl电极。最后，完成的硅和玻璃基板是粘合以形成整个系统的阳极。通过与电化学微转环中的常规固态Ag / AgCl Re进行比较，微型罐中的预封装饱和Kcl溶液为Ag / AgCl电极提供了稳定的工作环境，以确保恒定的参考电位。与常规玻璃结构Re以及用纳米通道阵列替换离子交换膜相比，小型化的重新达到更长的寿命。成品小型电极的尺寸为11mm×14mm。在连续测试中，参考电位变化仅为3000秒的连续测试。参考电位的标准偏差仅为3mm至30mm的不同NA2SO4缓冲率浓度为1.314mV。为了验证新型硅基小型化的实用性，施加制造的RE以测量水样中的亚硝酸盐的量，并达到R-2 = 0.998的更好的线性性。由于批量制造技术，这种小型化Re显示出更好的参考电位稳定性和一致性。这种小型设计和制造的新策略在在线监测水污染物的广泛使用中，在广泛使用的电化学传感器中显示了光明的未来。

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  • 来源
    《RSC Advances》 |2019年第34期|共8页
  • 作者

    Yin Jiawen; Zhang Wei; Zhang Zan; Jin Han; Gao Wanlei; Jian Jiawen; Jin Qinghui;

  • 作者单位

    Ningbo Univ Fac Elect Engn &

    Comp Sci Ningbo 315211 Zhejiang Peoples R China;

    Chinese Acad Sci Shanghai Inst Microsyst &

    Informat Technol Ctr Excellence Superconducting Elect State Key Lab Transducer Technol Shanghai 200050 Peoples R China;

    Ningbo Univ Fac Elect Engn &

    Comp Sci Ningbo 315211 Zhejiang Peoples R China;

    Ningbo Univ Fac Elect Engn &

    Comp Sci Ningbo 315211 Zhejiang Peoples R China;

    Ningbo Univ Fac Elect Engn &

    Comp Sci Ningbo 315211 Zhejiang Peoples R China;

    Ningbo Univ Fac Elect Engn &

    Comp Sci Ningbo 315211 Zhejiang Peoples R China;

    Ningbo Univ Fac Elect Engn &

    Comp Sci Ningbo 315211 Zhejiang Peoples R China;

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  • 正文语种 eng
  • 中图分类 化学;
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