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Influence of laser nanostructured diamond tools on the cutting behavior of silicon by molecular dynamics simulation

机译：激光纳米结构金刚石工具对分子动力学模拟硅切割行为的影响

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摘要

In this study, a series of large-scale molecular dynamics simulations have been performed to study the nanometric cutting of single crystal silicon with a laser-fabricated nanostructured diamond tool. The material removal behavior of the workpiece using a structured diamond tool cutting is studied. The effects of groove direction, depth, width, factor, and shape on material deformation are carefully investigated by analyzing normal stresses, shear stress, von Mises stress, hydrostatic stress, phase transformation, cutting temperature, cutting force and friction coefficients. Simulation results show that a cutting tool groove orientation of 60 degrees produces a smaller cutting force, less cutting heat, more beta-silicon phase, and less von Mises stress and hydrostatic stress. Moreover, tools with a smaller groove orientation, groove depth and groove width, and larger groove factor lead to more ductile cutting and an increased material removal rate. However, a cutting tool with a smaller groove width results in more heat during the nanoscale cutting process. In addition, the average temperature of the subsurface increases as groove factor increases, showing that a tool groove accelerates heat dissipation to the subsurface atoms. Furthermore, this V-shape groove cutting is shown to improve material removal ability in nanoscale cutting.
机译：在该研究中，已经进行了一系列大规模的分子动力学模拟，以研究用激光制造的纳米结构金刚石工具研究单晶硅的纳米切割。研究了使用结构化金刚石切割的工件的材料去除行为。通过分析正常应力，剪切应力，静音应力，静压应力，相变，切割温度，切割力和摩擦系数，仔细研究了沟槽方向，深度，宽度，因子和形状对材料变形的影响。仿真结果表明，60度的切削工具槽取向产生较小的切割力，较少的切割热，更β-硅相，较少的von误判和静液压应力。而且，具有较小槽取向的工具，凹槽深度和槽宽，较大的凹槽因子导致更延展性切割和提高的材料去除速率。然而，在纳米级切削过程中，具有较小槽宽的切削工具导致更多的热量。另外，随着凹槽因子的增加，地下的平均温度增加，表示工具槽加速到地下原子的散热。此外，该V形槽切割示出以改善纳米级切割中的材料去除能力。

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  • 来源
    《RSC Advances》 |2017年第25期|共17页
  • 作者

    Dai Houfu; Chen Genyu; Li Shaobo; Fang Qihong; Hu Bang;

  • 作者单位

    Guizhou Univ Coll Mech Engn Guiyang 550025 Peoples R China;

    Hunan Univ State Key Lab Adv Design &

    Mfg Vehicle Body Changsha 410082 Hunan Peoples R China;

    Guizhou Univ Coll Mech Engn Guiyang 550025 Peoples R China;

    Hunan Univ State Key Lab Adv Design &

    Mfg Vehicle Body Changsha 410082 Hunan Peoples R China;

    Hunan Univ State Key Lab Adv Design &

    Mfg Vehicle Body Changsha 410082 Hunan Peoples R China;

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  • 正文语种 eng
  • 中图分类 化学;
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