UV-NIR femtosecond laser hybrid lithography for efficient printing of complex on-chip waveguides

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UV-NIR femtosecond laser hybrid lithography for efficient printing of complex on-chip waveguides

机译：UV-NIR Femtosecond激光混合光刻，用于高效印刷复合片式波导

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We propose UV-IR femtosecond laser hybrid lithography for the efficient printing of complex on-chip waveguides, which offers good performance in terms of processing efficiency and accuracy. With this three-dimensional printing technology, waveguides with complex cross-section shapes, such as owls and kittens, can be easily fabricated with an efficiency increased by 1500% (for 6 mu m x 6 mu m). In addition, a circular cross-section waveguide with an extremely low birefringence and complex 8 x 8 random walk networks were quickly customized, which implies that in the design and preparation of the large-scale optical chips, the proposed maskless method allows for the preparation of highly customized devices. (C) 2020 Optical Society of America

机译：我们提出了UV-IR FemtoSecond激光混合光刻，用于高效印刷复合片式波纹，这在加工效率和准确性方面提供了良好的性能。利用这种三维印刷技术，具有复杂的横截面形状的波导，例如猫头鹰和小猫，可以容易地制造效率增加1500％（对于6μm×6μm）。另外，具有极低双折射和复杂的8×8随机步行网络的圆形横截面波导是快速定制的，这意味着在大规模光学芯片的设计和准备中，所提出的掩模方法允许制备高度定制的设备。（c）2020美国光学学会

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《Optics Letters》 |2020年第7期|共4页
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正文语种 eng
中图分类计量学;光学;
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1. UV-NIR femtosecond laser hybrid lithography for efficient printing of complex on-chip waveguides [J] . Optics Letters . 2020,第7期

机译：UV-NIR Femtosecond激光混合光刻，用于高效印刷复合片式波导
2. Ablation and functionalization of flexographic printing forms using femtosecond lasers for additively manufactured polymer-optical waveguides [J] . A. Wienke, G.-A. Hoffmann, J. Koch, Procedia CIRP . 2020,第Suppla1期

机译：使用Femtosecond激光器的柔性光学印刷形式的消融和官能化，用于加瘦性的聚合物 - 光波导
3. Efficient laser emission from cladding waveguide inscribed in Nd:GdVO_4 crystal by direct femtosecond laser writing [J] . Hongliang Liu, Yang Tan, Javier R. Vazquez de Aldana, Optics Letters . 2014,第15期

机译：直接飞秒激光写入从Nd：GdVO_4晶体中刻写的包层波导中的有效激光发射
4. Ablation and functionalization of flexographic printing forms using femtosecond lasers for additively manufactured polymer-optical waveguides [C] . A. Wienke, G. -A. Hoffmann, J. Koch, International Conference on Photonic Technologies . 2020

机译：使用Femtosecond激光器的荧光光学印刷形式的消融和功能化，用于加瘦性的聚合物光波导
5. Nonlinear glass waveguide devices fabricated by femtosecond laser writing with thermal poling and waveguide modeling for silver ion exchange in glass. [D] . Li, Guangyu. 2006

机译：通过飞秒激光写入，热极化和波导建模制造的非线性玻璃波导器件，用于玻璃中的银离子交换。
6. Efficient Second Harmonic Generation in 3D Nonlinear Optical-Lattice-Like Cladding Waveguide Splitters by Femtosecond Laser Inscription [O] . Weijie Nie, Yuechen Jia, Javier R. Vázquez de Aldana, -1

机译：飞秒激光题字在3D非线性光学晶格状包层波导分束器中高效产生第二谐波
7. Lithography-Free Plasmonic Color Printing with Femtosecond Laser on Semicontinuous Silver Films [O] . -1

机译：用飞秒激光在半连续银膜上的无光刻等离子体颜色印刷

UV-NIR femtosecond laser hybrid lithography for efficient printing of complex on-chip waveguides

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