Artificial neural networks have shown effectiveness in the inverse design of nanophotonic structures; however, the numerical accuracy and algorithm efficiency are not analyzed adequately in previous reports. In this Letter, we demonstrate the convolutional neural network as an inverse design tool to achieve high numerical accuracy in plasmonic metasurfaces. A comparison of the convolutional neural networks and the fully connected neural networks show that convolutional neural networks have higher generalization capabilities. We share practical guidelines for optimizing the neural network and analyzed the hierarchy of accuracy in the multi-parameter inverse design of plasmonic metasurfaces. A high inverse design accuracy of +/- 8 nm for the critical geometrical parameters is demonstrated. (C) 2020 Optical Society of America
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