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首页> 外文期刊>Optics Letters >High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform
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High-Q microresonators integrated with microheaters on a 3C-SiC-on-insulator platform

机译:高Q微度器与3C-SiC-On-Insulator平台上的微热器集成

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摘要

We demonstrate, to the best of our knowledge, the first thermally reconfigurable high-Q silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around 2.67 x 10(-5)/K for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-pm-radius microring resonator with intrinsic Q of 139,000 at infrared wavelengths (similar to 1550 nm) after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to similar to 50 mW per pi phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications. (C) 2019 Optical Society of America
机译:我们据我们所知,我们的知识展示了第一型热可重构的高Q碳化硅(SiC)微管谐振器,其在3C-SiC on绝缘体平台上具有集成的微热器。 我们从由热板加热的谐振器的波长换档中提取大约2.67×10(-5)/ k的热视光系数。 最后,在与NiCr微热器集成之后,我们制造了40-PAM半径的微管谐振器,其在红外波长(类似于1550nm)的内在Q. 通过施加电流通过微热器,在微管中实现30μm/ mW的共振偏移,对应于每Pi相移的50mW。 该平台提供了一种简单可靠的方式,可与电子设备集成,以及多样化的集成光学应用程序的潜力。 (c)2019年光学学会

著录项

  • 来源
    《Optics Letters》 |2019年第20期|共4页
  • 作者单位

    Georgia Inst Technol Sch Elect &

    Comp Engn Atlanta GA 30332 USA;

    Georgia Inst Technol Sch Elect &

    Comp Engn Atlanta GA 30332 USA;

    Georgia Inst Technol Sch Elect &

    Comp Engn Atlanta GA 30332 USA;

    Georgia Inst Technol Sch Elect &

    Comp Engn Atlanta GA 30332 USA;

  • 收录信息
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
  • 关键词

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