Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles

Allendorf Benedikt; Kaekel Eireen; Ha Uh-Myong; Hagemeier Sebastian; Hillmer Hartmut; Lehmann Peter

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Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles

机译：微粒3D测量的自适应高分辨率Linnik干涉测量

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Tailored 3D microparticles and nanostructures lead to increasing possibilities in semiconductor industry or biomedical applications. In an interdisciplinary study we investigate the parallel production of such partides by using nanoimprint lithography in combination with their characterization based on interference microscopy. In this Letter we report on a metrological inspection, which tends to a universal measurement solution comparing the sample optically to a master object produced in the same way as the sample. (C) 2019 Optical Society of America

机译：量身定制的3D微粒和纳米结构导致半导体工业或生物医学应用中的可能性。在跨学科研究中，我们通过使用基于干扰显微镜的表征的组合使用纳米压印光刻来研究这种偏移的并行产生。在这封信中，我们报告了计量检查，这倾向于将样品光学比较样品与样品以与样品相同的方式产生的主物体进行比较。（c）2019年光学学会

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来源
《Optics Letters》 |2019年第14期|共4页
作者
Allendorf Benedikt; Kaekel Eireen; Ha Uh-Myong; Hagemeier Sebastian; Hillmer Hartmut; Lehmann Peter;
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作者单位

Univ Kassel Dept Elect Engn &

Comp Sci Measurement Technol Wilhelmshoher Allee 71 D-34121 Kassel Germany;

Univ Kassel Inst Nanostruct Technol &

Analyt Heinrich Plett Str 40 D-34132 Kassel Germany;

Univ Kassel Inst Nanostruct Technol &

Analyt Heinrich Plett Str 40 D-34132 Kassel Germany;

Univ Kassel Dept Elect Engn &

Comp Sci Measurement Technol Wilhelmshoher Allee 71 D-34121 Kassel Germany;

Univ Kassel Inst Nanostruct Technol &

Analyt Heinrich Plett Str 40 D-34132 Kassel Germany;

Univ Kassel Dept Elect Engn &

Comp Sci Measurement Technol Wilhelmshoher Allee 71 D-34121 Kassel Germany;

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正文语种 eng
中图分类计量学;光学;
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1. Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles [J] . Allendorf Benedikt, Kaekel Eireen, Ha Uh-Myong, Optics Letters . 2019,第14期

机译：微粒3D测量的自适应高分辨率Linnik干涉测量
2. SPECIFIC NATURE OF FORMATION OF UNCERTAINTY IN MEASUREMENTS OF THE GEOMETRIC PARAMETERS OF SURFACE TEXTURE BY MEANS OF METHODS OF HIGH-RESOLUTION INTERFEROMETRY [J] . S. Yu. Zolotarevskii, S. A. Kononogov, V. G. Lysenko, Measurement techniques . 2013,第9期

机译：高分辨率干涉法测量表面纹理几何参数的不确定性形成的特殊性质
3. THE AMPLITUDE AND PHASE MEASUREMENTS OF FEMTOSECOND PULSE USING FRINGE FREE INTERFEROMETRY OF SPECTRAL HIGH-RESOLUTION METHOD [J] . LIANG LEI, YUAN WEI, JIN-YUN ZHOU, Journal of nonlinear optical physics & materials . 2013,第4期

机译：光谱高分辨率条纹无干涉法测量飞秒脉冲的振幅和相位
4. Complementarity of high-resolution COSMO-SkyMed and medium-resolution Sentinel-1 SAR interferometry: Quantitative analysis of real target displacement and 3D positioning measurement precision, and potential operational scenarios [C] . Mario Costantini, Fabio Malvarosa, Federico Minati, International Geoscience and Remote Sensing Symposium . 2017

机译：高分辨率COSMO-SkyMed和中分辨率Sentinel-1 SAR干涉测量法的互补性：实际目标位移和3D定位测量精度的定量分析以及潜在的操作方案
5. Shape and deformation measurement of 3D surface using phase stepping speckle interferometry [D] . Wang, Liu Sheng. 1994

机译：使用相位步进斑点干涉法测量3D表面的形状和变形
6. Parallel linear and subnanometric 3D tracking of microparticles with Stereo Darkfield Interferometry [O] . Martin Rieu, Thibault Vieille, Gaël Radou, 2021

机译：具有立体声暗田干涉测量的微粒的平行线性和亚域3D跟踪
7. Parallel, linear, and subnanometric 3D tracking of microparticles with Stereo Darkfield Interferometry [O] . Martin Rieu, Thibault Vieille, Gaël Radou, 2021

机译：具有立体声暗田干涉测量的微粒的平行，线性和亚域3D跟踪

Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles

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