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Silicon carbide double-microdisk resonator

机译:碳化硅双微米磁盘谐振器

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摘要

We demonstrate the first silicon carbide (SIC) double-microdisk resonator (DMR). The device has a compact footprint with a radius of 24 mu m and operates in the ITU high frequency range (3-30 MHz). We develop a multi-layer nanofabrication recipe that yields high optical quality (Q similar to 10(5)) for the SiC DMR. Because of its strong optomechanical interaction, we observe the thermal-Brownian motions of mechanical modes in a SiC DMR directly at room temperature for the first time, to the best of our knowledge. The observed mechanical modes include fundamental/second-order common modes and fundamental differential (DI) modes. The DI modes have high mechanical qualities >3800 at around 18.4 MHz tested in vacuum. We further show that optomechanical interactions, including linear and nonlinear optomechanical spring effects, can be observed in a SiC DMR at sub-milliwatt optical power. The SiC DMR has great potential for low-power optomechanical sensing applications in harsh environments. (C) 2019 Optical Society of America
机译:我们展示了第一碳化硅(SIC)双微米磁盘谐振器(DMR)。该装置具有紧凑的占地面积,半径为24亩,并在ITU高频范围(3-30 MHz)中操作。我们开发了一个多层纳米制作配方,产生了SiC DMR的高光学质量(Q类似于10(5))。由于其强烈的光学机械互动,我们首次在室温下直接在SiC DMR中遵守机械模式的热褐色动作,这是我们的知识。观察到的机械模式包括基本/二阶常见模式和基本差分(DI)模式。 DI模式具有高机械质量> 3800,在真空中测试约18.4MHz。我们进一步表明,可以在Sum-MilliWatt光功率的SiC DMR中观察到包括线性和非线性光学力学弹簧效果的光学力学相互作用。 SIC DMR在恶劣环境中具有很大的低功耗光学机械传感应用。 (c)2019年光学学会

著录项

  • 来源
    《Optics Letters》 |2019年第17期|共4页
  • 作者单位

    Univ Rochester Dept Phys &

    Astron Rochester NY 14627 USA;

    Univ Rochester Dept Elect &

    Comp Engn Rochester NY 14627 USA;

    Univ Rochester Dept Phys &

    Astron Rochester NY 14627 USA;

    Univ Rochester Dept Elect &

    Comp Engn Rochester NY 14627 USA;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
  • 关键词

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