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Control of diameter and numerical aperture of microlens by a single ultra-short laser pulse

机译:通过单短路激光脉冲控制微透镜直径和数值孔径

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摘要

We demonstrate a versatile method for fast and flexible fabrication of either one or an array of microlenses. Multi-foci axial intensity distribution generated by a phase pattern displayed on a spatial light modulator irradiates silica, causing ablation and its internal modification. The following wet etching step defines the diameter r, while the radius of curvature R (hence, the focal length f) is maintained the same. As a result, the numerical aperture NA = r/f changes from 0.2 to 0.4 for the same pulse energy (but different number of multi-foci) during ablation. An isotropic wet etching of silica becomes highly anisotropic for the initial stages of etching following the irradiated pattern. Subsequent evolution of the shape is governed by an isotropic silica etch and forms a spherical lens. This method can be extended to other materials and geometries of micro-optical elements. (C) 2019 Optical Society of America
机译:我们证明了一种多功能的方法,用于快速灵活地制造一个或一系列微透镜。 通过在空间光调制器上显示的相位模式产生的多灶轴向强度分布照射二氧化硅,引起消融及其内部修改。 以下湿法蚀刻步骤限定了直径R,而曲率半径R(因此,焦距F)保持相同。 结果,在消融期间,数值孔径Na = R / F在相同的脉冲能量(但不同数量的多焦点)下的0.2至0.4。 二氧化硅的各向同性湿法蚀刻对于辐照图案之后的蚀刻的初始阶段变得高度各向异性。 这种形状的随后的演化由各向同性二氧化硅蚀刻控制并形成球形透镜。 该方法可以扩展到微光学元件的其他材料和几何形状。 (c)2019年光学学会

著录项

  • 来源
    《Optics Letters》 |2019年第21期|共4页
  • 作者单位

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoeletron Changchun 130012 Jilin Peoples R China;

    Chinese Acad Sci Ningbo Inst Mat Technol &

    Engn Ningbo 315201 Zhejiang Peoples R China;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoeletron Changchun 130012 Jilin Peoples R China;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoeletron Changchun 130012 Jilin Peoples R China;

    Jilin Univ Coll Elect Sci &

    Engn State Key Lab Integrated Optoeletron Changchun 130012 Jilin Peoples R China;

    Swinbume Univ Technol Fac Sci Engn &

    Technol Ctr Microphoton Hawthorn Vic 3122 Australia;

    Tsinghua Univ Dept Precis Instrument State Key Lab Precis Measurement Technol &

    Instru Beijing 100084 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
  • 关键词

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