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Super-smooth surface demonstration and the physical mechanism of CO2 laser polishing of fused silica

机译：熔融二氧化硅二氧化碳激光抛光的超光滑表面演示及物理机理

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摘要

This Letter reports on the results of experiments aimed at obtaining high-quality super-smooth surfaces by investigating the laser polishing of fused silica. A maximum reduction in root-mean-square roughness to 0.156 nm was achieved, and laser-polished surfaces exhibited virtually no micro-defects or damage. A subsequent analysis using a multi-physics numerical model revealed the underlying physical mechanism of laser polishing of fused silica. The model simulated the surface smoothing process of laser polishing and demonstrated the effects of surface tension, the Marangoni effect, light pressure, and gravity in the process. It was found that the surface tension dominates the surface smoothing process, and it is a critical factor for achieving sub-nanometer micro-roughness of laser polishing of fused silica. Additionally, the model was successfully applied to predict the residual surface roughness of laser polishing. (C) 2018 Optical Society of America
机译：这封信通过研究熔融二氧化硅的激光抛光来报告旨在获得高质量超光表面的实验结果。 实现了根系平方粗糙度至0.156nm的最大降低，并且激光抛光表面几乎没有微缺陷或损坏。 使用多物理数值模型的后续分析显示了熔融二氧化硅激光抛光的底层物理机制。 该模型模拟了激光抛光的表面平滑过程，并证明了该过程中表面张力，Marangoni效应，轻度和重力的影响。 发现表面张力主导了表面平滑过程，并且是实现激光抛光的副纳米微粗糙度的熔熔二氧化硅的亚纳米微粗糙度的关键因素。 另外，该模型被成功地应用于预测激光抛光的残余表面粗糙度。 （c）2018年光学学会

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  • 来源
    《Optics Letters》 |2018年第23期|共4页
  • 作者

    He Ting; Wei Chaoyang; Jiang Zhigang; Zhao Yuanan; Shao Jianda;

  • 作者单位

    Chinese Acad Sci Shanghai Inst Opt &

    Fine Mech Key Lab Mat High Power Laser Shanghai 201800 Peoples R China;

    Chinese Acad Sci Shanghai Inst Opt &

    Fine Mech Key Lab Mat High Power Laser Shanghai 201800 Peoples R China;

    Chinese Acad Sci Shanghai Inst Opt &

    Fine Mech Key Lab Mat High Power Laser Shanghai 201800 Peoples R China;

    Chinese Acad Sci Shanghai Inst Opt &

    Fine Mech Key Lab Mat High Power Laser Shanghai 201800 Peoples R China;

    Chinese Acad Sci Shanghai Inst Opt &

    Fine Mech Key Lab Mat High Power Laser Shanghai 201800 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
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