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Single-pulse writing of a concave microlens array

机译：凹形微透镜阵列的单脉冲写入

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摘要

This work developed a method of femtosecond laser (fs-laser) parallel processing assisted by wet etching to fabricate 3D micro-optical components. A 2D fs-laser spot array with designed spatial distribution was generated by a spatial light modulator. A single-pulse exposure of the entire array was used for parallel processing. By subsequent wet etching, a close-packed hexagonal arrangement, 3D concave microlens array on a curved surface with a radius of approximately 120 mu m was fabricated, each unit lens of which has designable spatial distribution. Characterization of imaging was carried out by a microscope and showed a unique imaging property in multi-planes. This method provides a parallel and efficient technique to fabricate 3D micro-optical devices for applications in optofluidics, optical communication, and integrated optics. (C) 2018 Optical Society of America
机译：这项工作开发了一种通过湿法蚀刻辅助的飞秒激光（FS-激光）并联处理的方法，以制造3D微光学部件。 通过空间光调制器产生具有设计空间分布的2D FS激光点阵列。 整个阵列的单脉冲曝光用于并行处理。 通过随后的湿法蚀刻，制造闭合填充六边形布置，在弯曲表面上具有大约120μm的弯曲表面上的3D凹微透镜阵列，每个单元透镜具有可设计的空间分布。 成像的表征通过显微镜进行，并在多平面中显示出独特的成像性能。 该方法提供了一种平行和有效的技术，用于制造用于邻接，光学通信和集成光学器件中的应用的3D微光学装置。 （c）2018年光学学会

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  • 来源
    《Optics Letters》 |2018年第4期|共4页
  • 作者

    Cao Xiao-Wen; Chen Qi-Dai; Zhang Lei; Tian Zhen-Nan; Li Qian-Kun; Wang Lei; Juodkazis Saulius; Sun Hong-Bo;

  • 作者单位

    Jilin Univ State Key Lab Integrated Optoelect Sch Mech Sci &

    Engn Nanling Campus Changchun 130025 Jilin Peoples R China;

    Jilin Univ State Key Lab Integrated Optoelect Coll Elect Sci &

    Engn Changchun 130012 Jilin Peoples R China;

    Jilin Univ State Key Lab Integrated Optoelect Sch Mech Sci &

    Engn Nanling Campus Changchun 130025 Jilin Peoples R China;

    Jilin Univ State Key Lab Integrated Optoelect Coll Elect Sci &

    Engn Changchun 130012 Jilin Peoples R China;

    Jilin Univ State Key Lab Integrated Optoelect Coll Elect Sci &

    Engn Changchun 130012 Jilin Peoples R China;

    Jilin Univ State Key Lab Integrated Optoelect Coll Elect Sci &

    Engn Changchun 130012 Jilin Peoples R China;

    Swinburne Univ Technol Ctr Microphoton Fac Sci Engn &

    Technol Hawthorn Vic 3122 Australia;

    Jilin Univ State Key Lab Integrated Optoelect Coll Elect Sci &

    Engn Changchun 130012 Jilin Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 计量学;光学;
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