Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

Wang Peng; Chu Wei; Li Wenbo; Tan Yuanxin; Qi Jia; Liao Yang; Wang Zhanshan; Cheng Ya

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Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

机译：玻璃中的差异超敏感的三维微机械线，带有现代飞透的飞秒激光脉冲

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摘要

We observe that focusing a femtosecond laser beam simultaneously chirped in time and space domains in glass can efficiently suppress the optical aberration caused by the refractive index mismatch at the interface of air and the glass sample. We then demonstrate three-dimensional micro-processing in glass with a nearly invariant spatial resolution for a large range of penetration depth between 250 mu m and 9 mm without any aberration correction. (C) 2018 Optical Society of America

机译：我们观察到，聚焦激光束同时啁啾时间和玻璃的空间域可以有效地抑制由空气和玻璃样品的界面处的折射率失配引起的光学像差。然后，我们在玻璃中展示了三维微处理，其具有几乎不变的空间分辨率，用于大范围的穿透深度在250μm和9mm之间而没有任何像差校正。（c）2018年光学学会

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来源
《Optics Letters》 |2018年第15期|共4页
作者
Wang Peng; Chu Wei; Li Wenbo; Tan Yuanxin; Qi Jia; Liao Yang; Wang Zhanshan; Cheng Ya;
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作者单位

Tongji Univ Sch Phys Sci &

Engn Shanghai 200092 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

Tongji Univ Sch Phys Sci &

Engn Shanghai 200092 Peoples R China;

Chinese Acad Sci Shanghai Inst Opt &

Fine Mech State Key Lab High Field Laser Phys Shanghai 201800 Peoples R China;

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正文语种 eng
中图分类计量学;光学;
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专利

1. Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses [J] . Wang Peng, Chu Wei, Li Wenbo, Optics Letters . 2018,第15期

机译：玻璃中的差异超敏感的三维微机械线，带有现代飞透的飞秒激光脉冲
2. Low-threshold whispering-gallery-mode microlasers fabricated in a Nd:glass substrate by three-dimensional femtosecond laser micromachining [J] . Jintian Lin, Yingxin Xu, Jiangxin Song, Optics Letters . 2013,第9期

机译：通过三维飞秒激光微加工在Nd：玻璃基板上制造的低阈值耳语画廊模式微激光
3. Micromachining soda-lime glass by femtosecond laser pulses [J] . Jia Wei, Yu Jian, Chai Lu, Frontiers of physics . 2015,第4期

机译：飞秒激光脉冲微加工钠钙玻璃
4. Nd:glass regenerative amplifier with spatiotemporally shaped pulses for pumping an optical parametric chirped pulse amplification laser system [C] . Hugonnot, E., Luce, . 2005

机译：Nd：玻璃再生放大器，具有时空形状的脉冲，用于泵浦光参量pulse脉冲放大激光系统
5. Ablation and micromachining of indium phosphide with femtosecond laser pulses. [D] . Borowiec, Andrzej. 2004

机译：飞秒激光脉冲对磷化铟的烧蚀和微加工。
6. Transverse writing of three-dimensional tubular optical waveguides in glass with a slit-shaped femtosecond laser beam [O] . Yang Liao, Jia Qi, Peng Wang, -1

机译：用狭缝形飞秒激光束横向写入玻璃中的三维管状光波导
7. Low-threshold whispering-gallery-mode microlasers fabricated in a Nd: glass substrate by three-dimensional femtosecond laser micromachining [O] . Lin, Jintian, Xu, Yingxin, Song, Jiangxin, 2013

机译：在Nd制造的低阈值回音壁模式微型激光器：玻璃基板采用三维飞秒激光微加工技术

Aberration-insensitive three-dimensional micromachining in glass with spatiotemporally shaped femtosecond laser pulses

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