SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis

Kim Dae Hee; Yun Young Ho; Joo Ki-Nam

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SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis

机译：用于实时薄膜分析的稀疏（空间相位延迟光谱椭圆形测定法）

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In this Letter, we propose a novel type of spectroscopic ellipsometer, named spatially phase-retarded spectroscopic ellipsometry (SPARSE), based on the spatial polarization distribution opposed to the temporal polarization changes. SPARSE can collect all information necessary to characterize film structures with a single image acquisition, and it has the benefit of real-time measurements. For the verification, feasible experiments with single film-layered certificated reference materials and multi-layered film specimens were carried out. (C) 2017 Optical Society of America

机译：在这封信中，我们提出了一种小型类型的光谱椭圆仪，基于与时间偏振变化相对的空间偏振分布，命名为空间相位延迟的光谱椭圆仪（稀疏）。稀疏可收集必需的表征单图像采集薄膜结构的所有信息，并且它具有实时测量的优点。对于验证，进行单膜层分层认证的参考材料和多层薄膜样本的可行实验。（c）2017年光学学会

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《Optics Letters》 |2017年第16期|共4页
作者
Kim Dae Hee; Yun Young Ho; Joo Ki-Nam;
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Chosun Univ Dept Photon Engn 309 Pilmun Daero Gwangju 61452 South Korea;

Chosun Univ Dept Photon Engn 309 Pilmun Daero Gwangju 61452 South Korea;

Chosun Univ Dept Photon Engn 309 Pilmun Daero Gwangju 61452 South Korea;

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正文语种 eng
中图分类计量学;光学;
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1. SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis [J] . Kim Dae Hee, Yun Young Ho, Joo Ki-Nam Optics Letters . 2017,第16期

机译：用于实时薄膜分析的稀疏（空间相位延迟光谱椭圆形测定法）
2. Analysis of interband, intraband, and plasmon polariton transitions in silver nanoparticle films via in situ real-time spectroscopic ellipsometry [J] . S. A. Little, R. W. Collins, S. Marsillac Applied Physics Letters . 2011,第10期

机译：通过原位实时光谱椭圆仪分析银纳米颗粒薄膜中的带间，带内和等离激元跃迁
3. Real-time analysis of UV laser-induced growth of ultrathin oxide films on silicon by spectroscopic ellipsometry [J] . Patrik Patzner, Andrey V. Osipov, Peter Hess Applied Surface Science . 2005,第1a4期

机译：椭圆偏振光谱法实时分析紫外激光诱导的硅上超薄氧化膜生长
4. Spatially phase-retarded spectroscopic ellipsometry [C] . Dae Hee Kim, Young Ho Yun, Ki-Nam Joo International Conference of the European Society for Precision Engineering and Nanotechnology . 2018

机译：空间相延迟光谱椭圆形测定法
5. Real-time spectroscopic ellipsometry and its application to the processing of yttrium barium copper oxide films by molecular beam epitaxy. [D] . Gibbons, Brady J. 1998

机译：实时光谱椭偏仪及其在分子束外延处理钇钡氧化铜薄膜中的应用。
6. Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry [O] . Daniel Lehmann, Falko Seidel, Dietrich RT Zahn -1

机译：具有高表面粗糙度的薄膜：使用椭圆偏振光谱仪进行厚度和介电函数分析
7. Real-Time Spectroscopic Ellipsometry Analysis of Dissolution Process of Fe2O3-Cr2O3 Films Formed by Low Pressure CVD [O] . Takeo Kubota, Nobuyoshi Hara, Katsuhisa Sugimoto 1999

机译：低压CVD形成Fe2O3-Cr2O3薄膜溶出过程的实时光谱椭圆形分析
8. Real-Time Characterization of Hot-Wire CVD Growth of Si:H Films using Spectroscopic Ellipsometry: Preprint. [R] . Levi, D. 2001

机译：使用光谱椭偏法对si：H薄膜进行热丝CVD生长的实时表征：预印刷。

SPARSE (spatially phase-retarded spectroscopic ellipsometry) for real-time film analysis

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