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首页> 外文期刊>Optik: Zeitschrift fur Licht- und Elektronenoptik: = Journal for Light-and Electronoptic >Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy
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Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy

机译：使用非映像双信心为193nm散射域显微镜设计角度分辨照明光学元件的设计

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摘要

Accurate optics-based dimensional measurements of features sized well-below the diffraction limit require a thorough understanding of the illumination within the optical column and of the three-dimensional scattered fields that contain the information required for quantitative metrology. Scatterfield microscopy can pair simulations with angle-resolved tool characterization to improve agreement between the experiment and calculated libraries, yielding sub-nanometer parametric uncertainties. Optimized angle-resolved illumination requires bi-telecentric optics in which a telecentric sample plane defined by a Kohler illumination configuration and a telecentric conjugate back focal plane (CBFP) of the objective lens; scanning an aperture or an aperture source at the CBFP allows control of the illumination beam angle at the sample plane with minimal distortion. A bi-telecentric illumination optics have been designed enabling angle-resolved illumination for both aperture and source scanning modes while yielding low distortion and chief ray parallelism. The optimized design features a maximum chief ray angle at the CBFP of 0.002 and maximum wavefront deviations of less than 0.06 lambda for angle-resolved illumination beams at the sample plane, holding promise for high quality angle-resolved illumination for improved measurements of deep-subwavelength structures using deep-ultraviolet light. Published by Elsevier GmbH.
机译：基于精确的光学基于光学的尺寸测量尺寸低于衍射限制，需要彻底了解光学柱内的照明和包含定量计量所需信息的三维散射场。散射域显微镜可以用角度分辨工具表征对模拟，以改善实验和计算的文库之间的一致性，产生子纳米参数的不确定性。优化的角度分辨照明需要双远心光学器件，其中由木板照明配置和物镜的远心共轭背焦平面（CBFP）限定的远心样品平面;在CBFP处扫描孔径或孔径源允许以最小的失真控制样品平面处的照明光束角度控制。设计了双远心照明光学器件，其设计了孔径和源扫描模式的角度解析的照明，同时产生低失真和主要光线并行性。优化的设计具有0.002的CBFP的最大主要射线角度，并且对于样品平面上的角度分辨照明梁的最大负射线角度，最大的波前偏差为角度分辨照明光束，保持高质量的角度解析的照明，以改善深度亚波长的测量使用深紫外光的结构。由elsevier GmbH发布。

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