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首页> 外文期刊>Physics of fluids >Evolution of rivulets during spreading of an impinging water jet on a rotating, precoated substrate
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Evolution of rivulets during spreading of an impinging water jet on a rotating, precoated substrate

机译：在旋转，浸涂基板上撞击冲击水射流过程中的沿梁进化

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The spreading of a liquid film across a rotating surface is inherently unstable due to the centrifugal force, which causes the formation of rivulets along the spreading front. This instability produces a rich diversity of spreading patterns and is important to control for the optimization of spin-coating and spin-rinsing of silicon wafers during the fabrication of microelectronics. The present work is an experimental investigation of the evolution of rivulets arising from this instability during the spreading of an impinging water jet across a rotating substrate that is precoated with a thin, aqueous film. To characterize these rivulets, we developed a high-speed imaging apparatus and image-processing software that traces the spreading front over time. We show how the morphology of the spreading front is qualitatively affected by varying the Reynolds number of the impinging jet, the ratio of centrifugal to Coriolis forces, and the type of liquid used to precoat the substrate. For quantitative analysis of rivulets, we measured the "compactness ratio" of the spreading front, which quantifies deviation from a circular spreading front. We used the compactness ratio to demonstrate that rivulets are suppressed most strongly at low rotation rates, at high flow rates, and on substrates precoated with water, although with notable exceptions. Published under license by AIP Publishing.
机译：由于离心力，旋转表面穿过旋转表面的液体膜的扩散，这导致沿着扩散前沿形成铆钉。这种不稳定性产生了丰富的散布模式，并且在制造微电子期间控制硅晶片的优化和旋转漂洗的优化是重要的。本作本作的实验研究了在瞬间在旋转水膜上喷射冲击水射流期间从这种不稳定性产生的升压过程中产生的升降轴的进化的实验研究。为了表征这些流程，我们开发了一种高速成像设备和图像处理软件，其追溯到扩展前沿。我们展示了如何扩展前的形态定性影响通过改变冲击射流的雷诺数，离心到科里奥利力的比值，并用来预涂所述衬底的液体的类型。为了定量分析Rivulets，我们测量了扩散前的“紧凑性比”，其量化了与圆形扩展前沿的偏差。我们使用紧凑性比率来证明铆钉在低旋转速率下最强烈地抑制，高流速，并且在水预热的基板上，尽管具有显着的例外。通过AIP发布在许可证下发布。

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