Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

Tong Liuchuan; Davis Luke M.; Gong Xian; Feng Jun; Beh Eugene S.; Gordon Roy G.

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Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

机译：挥发性合成，反应性铸造金属5,5-双环脒，具有增强的化学气相沉积热稳定性

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Many microelectronic devices require thin films of silver or gold as wiring layers. We report silver(i) and gold(i) bicyclic amidinate complexes, wherein the constrained ligand geometry lessens the propensity for thermal decomposition. These new volatile compounds provide metallic films of silver and gold during CVD with hydrogen below 230 degrees C.

机译：许多微电子器件需要薄膜银或金作为布线层。我们报告银（I）和金（I）双环胺氨基酯复合物，其中约束的配体几何形状减少了热分解的倾向。这些新的挥发性化合物在CVD期间提供银和金的金属薄膜，其氢低于230℃。

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《Dalton transactions: An international journal of inorganic chemistry》 |2019年第20期|共5页
作者
Tong Liuchuan; Davis Luke M.; Gong Xian; Feng Jun; Beh Eugene S.; Gordon Roy G.;
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作者单位

Harvard Univ Dept Chem &

Chem Biol Cambridge MA 02138 USA;

Harvard Univ Dept Chem &

Chem Biol Cambridge MA 02138 USA;

Harvard Univ Harvard John A Paulson Sch Engn &

Appl Sci Cambridge MA 02138 USA;

Harvard Univ Dept Chem &

Chem Biol Cambridge MA 02138 USA;

Harvard Univ Dept Chem &

Chem Biol Cambridge MA 02138 USA;

Harvard Univ Dept Chem &

Chem Biol Cambridge MA 02138 USA;

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正文语种 eng
中图分类化学;无机化学;
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1. Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition [J] . Tong Liuchuan, Davis Luke M., Gong Xian, Dalton transactions: An international journal of inorganic chemistry . 2019,第20期

机译：挥发性合成，反应性铸造金属5,5-双环脒，具有增强的化学气相沉积热稳定性
2. Synthesis and characterization of volatile, thermally stable, reactive transition metal amidinates [J] . Lim BS., Rahtu A., Park JS., Inorganic Chemistry: A Research Journal that Includes Bioinorganic, Catalytic, Organometallic, Solid-State, and Synthetic Chemistry and Reaction Dynamics . 2003,第24期

机译：挥发性，热稳定，反应性过渡金属a酰胺的合成与表征
3. Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) yields better Hydrolytical Stability of Biocompatible SiOx Thin Films on Implant Alumina Ceramics compared to Rapid Thermal Evaporation Physical Vapor Deposition (PVD) [J] . Boeke Frederik, Giner Ignacio, Keller Adrian, ACS applied materials & interfaces . 2016,第28期

机译：与快速热蒸发物理气相沉积（PVD）相比，等离子体增强化学气相沉积（PE-CVD）在植入氧化铝陶瓷上产生更好的生物相容性SiOx薄膜的水解稳定性
4. Comparison of characteristics of carbon nanotubes grown by plasma enhanced chemical vapor deposition and thermal chemical vapor deposition [C] . Ha Jin Kim, In Taek Han, Young Jun Park, The Meeting of the Electrochemical Society . 2003

机译：等离子体增强化学气相沉积和热化学气相沉积种植的碳纳米管特性的比较
5. New metal-organic chemistry of barium, an aqueous synthesis for volatile alkaline earth complexes, and synthesis and characterization of thallium-barium-calcium-copper-oxygen thin films by metal-organic chemical vapor deposition. [D] . Schulz, Douglas Lloyd. 1993

机译：钡的新金属有机化学，挥发性碱土金属配合物的水合成以及通过金属有机化学气相沉积法合成al-钡-钙-铜-氧薄膜。
6. Synthesis of Nitrogen-Doped Graphene on Copper Nanowires for Efficient Thermal Conductivity and Stability by Using Conventional Thermal Chemical Vapor Deposition [O] . Minjeong Park, Seul-Ki Ahn, Sookhyun Hwang, 2019

机译：常规热化学气相沉积法在铜纳米线上合成氮掺杂石墨烯以提高热导率和稳定性
7. Growth Behavior and Thermal Stability of CoSi2Layer on Poly-Si Substrate Using Reactive Chemical Vapor Deposition [O] . 2003

机译：反应化学气相沉积的Cosi2镶嵌对Cosi2晶体的生长行为及热稳定性
8. Volatile Barium Beta-Diketonate Polyether Adducts. Synthesis, Characterizationand Metalorganic Chemical Vapor Deposition [R] . Gardiner, R. A., Brown, D. W., Kirlin, P. S., 1991

机译：挥发性钡β-二酮酸聚醚加合物。合成，表征及金属有机化学气相沉积

Synthesis of volatile, reactive coinage metal 5,5-bicyclic amidinates with enhanced thermal stability for chemical vapor deposition

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