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首页> 外文期刊>Dalton transactions: An international journal of inorganic chemistry >Synthesis and characterization of heteroleptic titanium MOCVD precursors for TiO2 thin films
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Synthesis and characterization of heteroleptic titanium MOCVD precursors for TiO2 thin films

机译：TiO2薄膜异常MOCVD前体的合成与表征

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摘要

Heteroleptic titanium alkoxides with three different ligands, i.e., [Ti((OPr)-Pr-i)(X)(Y)] (X = tridentate, Y = bidentate ligands), were synthesized to find efficient metal organic chemical vapor deposition (MOCVD) precursors for TiO2 thin films. Acetylacetone (acacH) or 2,2,6,6-tetramethyl-3,5-heptanedione (thdH) was employed as a bidentate ligand, while N-methyldiethanolamine (MDEA) was employed as a tridentate ligand. It was expected that the oxygen and moisture susceptibility of titanium alkoxides, as well as their tendency to form oligomers, would be greatly reduced by placing multidentate and bulky ligands around the center Ti atom. The synthesized heteroleptic titanium alkoxides were characterized both physicochemically and crystallographically, and their thermal behaviors were also investigated. [Ti((OPr)-Pr-i)(MDEA)(thd)] was found to be monomeric and stable against moisture; it also showed good volatility in the temperature window between volatilization and decomposition. This material was used as a single-source precursor during MOCVD to generate TiO2 thin films on silicon wafers. The high thermal stability of [Ti((OPr)-Pr-i)(MDEA)(thd)] enabled the fabrication of TiO2 films over a wide temperature range, with steady growth rates between 500 and 800 degrees C.
机译：合成具有三种不同配体的异磷钛醇盐，即[Ti（（OPR）-PR-I）（x）（x）（x =三齿，y =二齿配体），以找到有效的金属有机化学气相沉积（ MOCVD）TiO2薄膜前体。乙酰丙酮（ACACH）或2,2,6,6-四甲基-3,5-庚烷（THDH）用作二齿配体，而N-甲基二乙醇胺（MDEA）用作三叉子配体。预期通过将围绕中心Ti原子置于中心Ti原子周围的多透明和庞大的配体，大大降低了钛醇盐的氧气和水分敏感性，以及它们形成低聚物的倾向。合成的异磷钛醇盐在物理化学和晶体上表征，还研究了它们的热行为。 [Ti（（OPR）-PR-1）（MDEA）（MDEA）]被发现是单体和稳定的含水量;在挥发和分解之间的温度窗口中也显示出良好的挥发性。在MOCVD期间将该材料用作单源前体，以在硅晶片上产生TiO 2薄膜。 [Ti（OPR）-PR-I）（MDEA）（MDEA）]的高热稳定性使得在宽温度范围内的TiO 2膜的制备，具有500至800℃之间的稳定生长速率。

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