...
首页> 外文期刊>Dalton transactions: An international journal of inorganic chemistry >Chalcogenoether complexes of Nb(V) thio- and seleno-halides as single source precursors for low pressure chemical vapour deposition of NbS2 and NbSe2 thin films
【24h】

Chalcogenoether complexes of Nb(V) thio- and seleno-halides as single source precursors for low pressure chemical vapour deposition of NbS2 and NbSe2 thin films

机译:Nb(v)硫代(V)和硒卤化物的核化含量络合物,作为单源前体,用于低压化学气相沉积NBS2和Nbse2薄膜

获取原文
获取原文并翻译 | 示例
           

摘要

NbSCl3 was obtained via reaction of NbCl5 with S(SiMe3)(2) in anhydrous CH2Cl2, whilst in MeCN solution the same reaction gives [NbSCl3(MeCN)(2)]. [NbSeCl3(MeCN)(2)] was obtained similarly from NbCl5 with Se (SiMe3) 2. The chalcogenoether complexes, [NbSCl3(ER2)] (E = S: R = Me, nBu; E = Se: R = nBu), were obtained from reaction of NbCl5, ER2 and S(SiMe3)(2) in CH2Cl2. The structure of the [Nb2S2Cl6(SMe2) 2] reveals a Cl-bridged dimer with the SMe2 ligands disposed syn. The Cl bridges are highly asymmetric, with the long Nb-Cl bond trans NbvS. The complexes, [NbSCl3(L-L)] (L-L = MeSCH2CH2SMe, MeS (CH2)(3)SMe, iPrSCH(2)CH(2)SiPr, MeSe(CH2)(3)SeMe and nBuS(CH2)(3)SnBu), were obtained from reaction of L-L with preformed [NbSCl3(MeCN)(2)]. The structures of the Me-substituted complexes reveal distorted octahedral monomers with the neutral ligands trans to S/ Cl. Solution H-1 and Se-77{H-1} NMR data showed that the neutral ligands are partially dissociated and undergoing fast exchange at ambient temperatures in CH2Cl2 solution, consistent with weak Lewis acidity for NbSCl3. The complexes containing nBu-substituted ligands have been used as single source precursors for low pressure chemical vapour deposition (CVD) of 3R-NbS2 thin films. 2H-NbSe2 thin films were also obtained via low pressure CVD using [NbSe2Cl3(SenBu(2))]. The thin films were characterised by grazing incidence and in-plane XRD, pole figure analysis, scanning electron microscopy and energy dispersive X-ray analysis.
机译:NbSCl3经由在无水CH 2 Cl与S(SiMe3)(2)NbCl5的反应而获得,而在MeCN中的溶液相同的反应,得到[NbSCl3(MeCN中)(2)]。 [NbSeCl3(MeCN中)(2)]用硒(SiMe3)类似地获得从NbCl5 2. chalcogenoether络合物,[NbSCl3(ER2)](E = S:R = Me中,NBU; E =硒:R = NBU)中,从在CH 2 Cl NbCl5,ER2和S(SiMe3)(2)的反应制得。的[Nb2S2Cl6(SME2)2]的结构揭示的C1-桥接与SME2二聚体配体设置SYN。该氯桥是高度不对称,与长的Nb-Cl键反式NbvS。的配合物,[NbSCl3(LL)](LL = MeSCH2CH2SMe,MES(CH 2)(3)SME,iPrSCH(2)CH(2)SIPR,MESE(CH 2)(3)SEME和NBUS(CH 2)(3)SnBu ),从用预制[NbSCl3(MeCN中)(2)] LL的反应而获得。在ME取代的复合物的结构揭示了与中性配位体的反式到S /氯扭曲的八面体的单体。溶液H-1和SE-77 {H-1} NMR数据表明,中性配体部分离解,并经受在CH2Cl2溶液的环境温度下,用弱路易斯酸度为NbSCl3一致快速交换。含NBU取代的配体的配合物已被用作单一来源前体3R-的NbS2薄膜的低压化学气相沉积(CVD)。 2H-NbSe2薄膜,也可以通过低压CVD法获得的[NbSe2Cl3(SenBu(2))]。掠入射和面内XRD,极点图分析的薄膜进行了表征,扫描电子显微镜和能量分散型X射线分析。

著录项

相似文献

  • 外文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号